Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD
| BRZOBOHATÝ, Oto, Lenka ZAJÍČKOVÁ and Vilma BURŠÍKOVÁ. Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD. In JUNIORMAT 01. 1st ed. Brno: ÚMI VUT FSI v Brně ve spolupráci s Českou společností pro nové materiály a technologie, 2001, p. 144-145. ISBN 80-214-1885-0. |
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| Basic information | |
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| Original name | Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD |
| Name in Czech | Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD |
| Authors | BRZOBOHATÝ, Oto (203 Czech Republic), Lenka ZAJÍČKOVÁ (203 Czech Republic, guarantor) and Vilma BURŠÍKOVÁ (203 Czech Republic). |
| Edition | 1. vyd. Brno, JUNIORMAT 01, p. 144-145, 2001. |
| Publisher | ÚMI VUT FSI v Brně ve spolupráci s Českou společností pro nové materiály a technologie |
| Other information | |
|---|---|
| Original language | English |
| Type of outcome | Proceedings paper |
| Field of Study | 10305 Fluids and plasma physics |
| Country of publisher | Czech Republic |
| Confidentiality degree | is not subject to a state or trade secret |
| RIV identification code | RIV/00216224:14310/01:00004507 |
| Organization unit | Faculty of Science |
| ISBN | 80-214-1885-0 |
| Keywords in English | Diamond-like carbon; PECVD; Ellipsometry |
| Tags | Diamond-like Carbon, ellipsometry, PECVD |
| Changed by | Changed by: doc. RNDr. Vilma Buršíková, Ph.D., učo 2418. Changed: 8/2/2008 20:06. |
| Abstract |
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| Silicon incorporated diamond-like films were deposited by 13.56 MHz rf PECVD and the optical properties of the films were examined by the ellipsometric method. Various mixtures of methane and hexamethyldisiloxane (HMDSO) were used as reaction gases for deposition. The dependencies of the refraction and absorption indices on deposition conditions were studied. |
| Abstract (in Czech) |
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| Silicon incorporated diamond-like films were deposited by 13.56 MHz rf PECVD and the optical properties of the films were examined by the ellipsometric method. Various mixtures of methane and hexamethyldisiloxane (HMDSO) were used as reaction gases for deposition. The dependencies of the refraction and absorption indices on deposition conditions were studied. |
| Links | |
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| GA202/00/P037, research and development project | Name: Plazmová depozice ochranných vrstev: charakterizace připravených vrstev a diagnostika užitého reaktivního plazmatu |
| Investor: Czech Science Foundation, Plasma deposition of protective coatings: characterisation of prepared films and diagnostics of reactive plasmas used | |
| ME 301, research and development project | Name: Vývoj a průmyslová aplikace nových supertvrdých nanokrystalických kompozitních otěruvzdorných ochranných vrstev |
| Investor: Ministry of Education, Youth and Sports of the CR, Development and Industrialization of Novel Superhard Nanocrystalline Composite Wear Protective Coatings | |
| MSM 143100003, plan (intention) | Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek |
| Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates | |
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