ANOPCHENKO, A., M. JERGEL, E. MAJKOVA a V. HOLY. Effect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers - X-ray comparative study. Physica B. Amsterdam: Elsevier Science, 2001, roč. 305, č. 1, s. 14-20. ISSN 0921-4526/00. |
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@article{385235, author = {Anopchenko, A. and Jergel, M. and Majkova, E. and Holy, V.}, article_location = {Amsterdam}, article_number = {1}, language = {eng}, issn = {0921-4526/00}, journal = {Physica B}, title = {Effect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers - X-ray comparative study}, volume = {305}, year = {2001} }
TY - JOUR ID - 385235 AU - Anopchenko, A. - Jergel, M. - Majkova, E. - Holy, V. PY - 2001 TI - Effect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers - X-ray comparative study JF - Physica B VL - 305 IS - 1 SP - 14 EP - 14 PB - Elsevier Science SN - 09214526/00 N2 - Effect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers - X-ray comparative study ER -
ANOPCHENKO, A., M. JERGEL, E. MAJKOVA a V. HOLY. Effect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers - X-ray comparative study. \textit{Physica B}. Amsterdam: Elsevier Science, 2001, roč.~305, č.~1, s.~14-20. ISSN~0921-4526/00.
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