| ANOPCHENKO, A., M. JERGEL, E. MAJKOVA a V. HOLY. Effect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers - X-ray comparative study. Physica B. Amsterdam: Elsevier Science, 2001, roč. 305, č. 1, s. 14-20. ISSN 0921-4526/00. |
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@article{385235,
author = {Anopchenko, A. and Jergel, M. and Majkova, E. and Holy, V.},
article_location = {Amsterdam},
article_number = {1},
language = {eng},
issn = {0921-4526/00},
journal = {Physica B},
title = {Effect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers - X-ray comparative study},
volume = {305},
year = {2001}
}
TY - JOUR
ID - 385235
AU - Anopchenko, A. - Jergel, M. - Majkova, E. - Holy, V.
PY - 2001
TI - Effect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers - X-ray comparative study
JF - Physica B
VL - 305
IS - 1
SP - 14
EP - 14
PB - Elsevier Science
SN - 09214526/00
N2 - Effect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers - X-ray comparative study
ER -
ANOPCHENKO, A., M. JERGEL, E. MAJKOVA a V. HOLY. Effect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers - X-ray comparative study. \textit{Physica B}. Amsterdam: Elsevier Science, 2001, roč.~305, č.~1, s.~14-20. ISSN~0921-4526/00.
|
