Advanced methods for deposition of thin films: monitoring, properties, application

BRABLEC, Antonín, Jiří BUCHTA, Vilma BURŠÍKOVÁ, Ondřej JAŠEK, Vít KUDRLE, Pavel SLAVÍČEK, David TRUNEC and Lenka ZAJÍČKOVÁ. Advanced methods for deposition of thin films: monitoring, properties, application. Tomsk: E.T.Protasevich, 2002, 157 pp. Tomsk series.

Basic information

• Original name: Advanced methods for deposition of thin films: monitoring, properties, application
• Authors: BRABLEC, Antonín (203 Czech Republic, guarantor), Jiří BUCHTA (203 Czech Republic), Vilma BURŠÍKOVÁ (203 Czech Republic), Ondřej JAŠEK (203 Czech Republic), Vít KUDRLE (203 Czech Republic), Pavel SLAVÍČEK (203 Czech Republic), David TRUNEC (203 Czech Republic) and Lenka ZAJÍČKOVÁ (203 Czech Republic).
• Edition: Tomsk, 157 pp. Tomsk series, 2002.
• Publisher: E.T.Protasevich

Other information

• Original language: English
• Type of outcome: Book on a specialized topic
• Field of Study: 10305 Fluids and plasma physics
• Country of publisher: Russian Federation
• Confidentiality degree: is not subject to a state or trade secret
• RIV identification code: RIV/00216224:14330/02:00005794
• Organization unit: Faculty of Informatics
• Keywords in English: thin films; plasma deposition
• Tags: plasma deposition, thin films
• Tags: International impact

Abstract

Advanced methods for deposition of thin films: monitoring, properties, application

Links

• GP202/01/P017, research and development project: Name: Spektrální a optická diagnostika vf-výbojů hořících za atmosferického tlaku

Investor: Czech Science Foundation, Spectroscopic and optical diagnostics of rf-discharges burning at atmospheric pressure

• GP202/01/P106, research and development project: Name: Studium plazmochemických procesů pomocí mikrovlnné a optické spektroskopie

Investor: Czech Science Foundation, Study of plasmachemical processes using microwave and optical spectroscopy

• ME 301, research and development project: Name: Vývoj a průmyslová aplikace nových supertvrdých nanokrystalických kompozitních otěruvzdorných ochranných vrstev

Investor: Ministry of Education, Youth and Sports of the CR, Development and Industrialization of Novel Superhard Nanocrystalline Composite Wear Protective Coatings

• ME 367, research and development project: Name: Výzkum a vývoj supertvrdých nanokrystalických kompositních materiálů

Investor: Ministry of Education, Youth and Sports of the CR, Research and development and industrializartion of novel super hard nanocrystalline materials

• MSM 143100003, plan (intention): Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates

• OC 527.20, research and development project: Name: Plazmochemické depozice a plazmochemické opracování povrchu pevných substrátů

Investor: Ministry of Education, Youth and Sports of the CR, Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate