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@inproceedings{485364,
author = {Šmíd, Radek and Zajíčková, Lenka and Dvořák, Pavel},
address = {Praha},
booktitle = {WDS'01, Proceedings of contributed papers, Part II, Physics of Plasmas and Ionized Media},
edition = {2001},
keywords = {capacitevely coupled r.f. discharge; Langmuir probe},
language = {eng},
location = {Praha},
isbn = {80-85863-73-1},
pages = {435-438},
publisher = {MATFYZPRESS},
title = {Probe measurements in capacitively coupled rf discharge},
year = {2001}
}
TY - JOUR
ID - 485364
AU - Šmíd, Radek - Zajíčková, Lenka - Dvořák, Pavel
PY - 2001
TI - Probe measurements in capacitively coupled rf discharge
PB - MATFYZPRESS
CY - Praha
SN - 8085863731
KW - capacitevely coupled r.f. discharge
KW - Langmuir probe
N2 - The current-voltage characteristics were measured by r.f. compensated Langmuir probe in capacitevely coupled r.f. discharges. Two different gases, argon and nitrogen, were used. From I-V curves were taken main parameters as a plasma and floating potentials, electron temperatures, electron concentration, and mean electron energy and their dependence on input power over the range from 5 to 40 W, distance between electrodes and probe position in radial axe in gas pressure between 0.43 and 4.3 Pa.
ER -
ŠMÍD, Radek, Lenka ZAJÍČKOVÁ a Pavel DVOŘÁK. Probe measurements in capacitively coupled rf discharge. In \textit{WDS'01, Proceedings of contributed papers, Part II, Physics of Plasmas and Ionized Media}. 2001. vyd. Praha: MATFYZPRESS, 2001, s.~435-438. ISBN~80-85863-73-1.
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