Reduction of tungsten precursors in inductively coupled RF discharge

JANČA, Jan, Marek ELIÁŠ and Vlastimil BROŽEK. Reduction of tungsten precursors in inductively coupled RF discharge. Pierre Fauchais. In Progress in Plasma Processing of Materials 2003. 1st. New York, 2003: Begell House, Inc. New York, U.S.A., 2003, p. 737 - 742. ISBN 1-56700-192-0.

Basic information

Original name

Reduction of tungsten precursors in inductively coupled RF discharge

Authors

JANČA, Jan (203 Czech Republic, guarantor), Marek ELIÁŠ (203 Czech Republic) and Vlastimil BROŽEK (203 Czech Republic)
Pierre Fauchais.

Edition

1st. New York, 2003, Progress in Plasma Processing of Materials 2003, p. 737 - 742, 6 pp. 2003

Publisher

Begell House, Inc. New York, U.S.A.

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Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10305 Fluids and plasma physics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

RIV identification code

RIV/00216224:14310/03:00008845

Organization unit

Faculty of Science

ISBN

1-56700-192-0

Keywords in English

plasma reduction; tungsten carbide;inductively coupled RF plasma; tungsten precursors

Tags

inductively coupled RF plasma, plasma reduction, tungsten carbide, tungsten precursors

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Abstract

V originále

Synthesis of catalytically active tungsten carbide compounds with the aid of plasmachemical reaction.Ammonium paratungstate (APT) was used as precursor.The final powder was mixture of tungsten and tungsten carbide (6%), grain size 50 um.

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Links

MSM 143100003, plan (intention)

Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates