| DVOŘÁK, Pavel, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ, Miroslav VALTR, J. HOUDKOVÁ, V. PEŘINA a A. MACKOVÁ. Plasma Deposition of Diamond-Like Protective Coating with Silicon Oxide Content. In 46th Annual SVC Technical Conference Proceedings. San Francisco: Society of Vacuum Coaters (SVC), 2003, s. 23-27. ISBN 0737-5921. |
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@inproceedings{489744,
author = {Dvořák, Pavel and Zajíčková, Lenka and Buršíková, Vilma and Valtr, Miroslav and Houdková, J. and Peřina, V. and Macková, A.},
address = {San Francisco},
booktitle = {46th Annual SVC Technical Conference Proceedings},
keywords = {Wear/abrasion-resistant coatings; Plasma enhanced CVD; Stability properties; Residual film stress},
language = {eng},
location = {San Francisco},
isbn = {0737-5921},
pages = {23-27},
publisher = {Society of Vacuum Coaters (SVC)},
title = {Plasma Deposition of Diamond-Like Protective Coating with Silicon Oxide Content},
year = {2003}
}
TY - JOUR
ID - 489744
AU - Dvořák, Pavel - Zajíčková, Lenka - Buršíková, Vilma - Valtr, Miroslav - Houdková, J. - Peřina, V. - Macková, A.
PY - 2003
TI - Plasma Deposition of Diamond-Like Protective Coating with Silicon Oxide Content
PB - Society of Vacuum Coaters (SVC)
CY - San Francisco
SN - 07375921
KW - Wear/abrasion-resistant coatings
KW - Plasma enhanced CVD
KW - Stability properties
KW - Residual film stress
N2 - Amorphous diamond-like carbon films with various silicon and oxygen content were deposited by plasma-enhanced chemical vapor deposition technique. The films were prepared from the mixture of methane and hexamethyldisiloxane in rf capacitively coupled discharges. The optimum SiOx percentage in the DLC network at which the thermo-mechanical stability of the DLC films was improved was determined.
ER -
DVOŘÁK, Pavel, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ, Miroslav VALTR, J. HOUDKOVÁ, V. PEŘINA a A. MACKOVÁ. Plasma Deposition of Diamond-Like Protective Coating with Silicon Oxide Content. In \textit{46th Annual SVC Technical Conference Proceedings}. San Francisco: Society of Vacuum Coaters (SVC), 2003, s.~23-27. ISBN~0737-5921.
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