| JANČA, Jan, Marek ELIÁŠ a Vlastimil BROŽEK. Reduction of tungsten precursors in inductive rf discharge plasma reactors. High Temperature Material Processes. New York: Begell House Inc.n New York 10920, 2003, roč. 7/2003, č. 3, s. 357-366. ISSN 1093-3611. |
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@article{492294,
author = {Janča, Jan and Eliáš, Marek and Brožek, Vlastimil},
article_location = {New York},
article_number = {3},
keywords = {tungsten; tungsten carbide; plasma reduction; plasma carbidization;inductive coupled .h.f. plasma reactor},
language = {eng},
issn = {1093-3611},
journal = {High Temperature Material Processes},
title = {Reduction of tungsten precursors in inductive rf discharge plasma reactors},
volume = {7/2003},
year = {2003}
}
TY - JOUR
ID - 492294
AU - Janča, Jan - Eliáš, Marek - Brožek, Vlastimil
PY - 2003
TI - Reduction of tungsten precursors in inductive rf discharge plasma reactors
JF - High Temperature Material Processes
VL - 7/2003
IS - 3
SP - 357-366
EP - 357-366
PB - Begell House Inc.n New York 10920
SN - 10933611
KW - tungsten
KW - tungsten carbide
KW - plasma reduction
KW - plasma carbidization;inductive coupled .h.f. plasma reactor
N2 - Ammonium paratungstate (APT) was reduced in inductively coupled h.f. plasma reactor(4 MHz,2 kW). As working gas was used hydrogen. If the mixture of hydrogen with hydrocarbon is used (methane, propan butane)it is possible to prepare also tungsten carbide in the ratio up to WC/W=80/20.
ER -
JANČA, Jan, Marek ELIÁŠ a Vlastimil BROŽEK. Reduction of tungsten precursors in inductive rf discharge plasma reactors. \textit{High Temperature Material Processes}. New York: Begell House Inc.n New York 10920, 2003, roč.~7/2003, č.~3, s.~357-366. ISSN~1093-3611.
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