| OHLÍDAL, Ivan, Miloslav OHLÍDAL, Petr KLAPETEK, Vladimír ČUDEK a Miloš JÁKL. Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry. Proceedings of SPIE. Bellingham: SPIE, 2003, roč. 5182, č. 2, s. 260-271, 11 s. ISSN 0277-786X. |
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@article{493197,
author = {Ohlídal, Ivan and Ohlídal, Miloslav and Klapetek, Petr and Čudek, Vladimír and Jákl, Miloš},
article_location = {Bellingham},
article_number = {2},
keywords = {fims nonuniform in optical parameters; optical characterization},
language = {eng},
issn = {0277-786X},
journal = {Proceedings of SPIE},
title = {Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry},
volume = {5182},
year = {2003}
}
TY - JOUR
ID - 493197
AU - Ohlídal, Ivan - Ohlídal, Miloslav - Klapetek, Petr - Čudek, Vladimír - Jákl, Miloš
PY - 2003
TI - Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry
JF - Proceedings of SPIE
VL - 5182
IS - 2
SP - 260-271
EP - 260-271
PB - SPIE
SN - 0277786X
KW - fims nonuniform in optical parameters
KW - optical characterization
N2 - In this paper, a new optical method for characterizing nonuniform thin films is employed. For applying this method the special experimental arrangement containing CCD camera as a detector is used. Using this experimental arrangement the spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large areas of the substrates of the nonuniform films are found. Moreover, it is shown that this method can be used to determine strong nonuniformities in both the optical parameters.
ER -
OHLÍDAL, Ivan, Miloslav OHLÍDAL, Petr KLAPETEK, Vladimír ČUDEK a Miloš JÁKL. Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry. \textit{Proceedings of SPIE}. Bellingham: SPIE, 2003, roč.~5182, č.~2, s.~260-271, 11 s. ISSN~0277-786X.
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