Recent Developments on Ionized Physical Vapour Deposition:
Concepts, Determination of the Ionization Efficiency and
Improvement of Deposited Films

C 2004

Recent Developments on Ionized Physical Vapour Deposition: Concepts, Determination of the Ionization Efficiency and Improvement of Deposited Films

BRETAGNE, Jean; Ludovic DE POUCQUES; Caroline BOISSE-LAPORTE; Gerard GOUSSET; Marie-Christine HUGON et al.

Základní údaje

Originální název

Recent Developments on Ionized Physical Vapour Deposition: Concepts, Determination of the Ionization Efficiency and Improvement of Deposited Films

Autoři

BRETAGNE, Jean; Ludovic DE POUCQUES; Caroline BOISSE-LAPORTE; Gerard GOUSSET; Marie-Christine HUGON; Jean-Christophe IMBERT; Olivier LEROY; Lionel TEULÉ-GAY; Michel TOUZEAU a Petr VAŠINA

Vydání

Netherland, Nanostructured Thin Films and Nanodispersion Strengthened Coating, od s. 113-122, 9 s. NATO Science Series II, Vol 155, 2004

Nakladatel

Springer, Kluwer Academic Publisher

Další údaje

Jazyk

angličtina

Typ výsledku

Kapitola resp. kapitoly v odborné knize

Obor

10305 Fluids and plasma physics

Stát vydavatele

Nizozemské království

Utajení

není předmětem státního či obchodního tajemství

Označené pro přenos do RIV

Organizační jednotka

Přírodovědecká fakulta

ISBN

1-4020-2220-4

Klíčová slova anglicky

IPVD; magnetron discharge; absorption spectroscopy; deposition

Štítky

absorption spectroscopy, deposition, IPVD, magnetron discharge

Změněno: 4. 10. 2004 13:22, prof. Mgr. Petr Vašina, Ph.D.

Anotace

V originále

While most of IPVD reactors use radio frequency coil to create additional ionization, we developed an alternative technique in which the ionization of the emitted sputtered vapor is archived by two microwave antennas. Langmuir probe measurement were used to determine electronic density and temperature. Optical emission and absorption spectroscopy has been performed to determine the ionized fraction of the sputtered vapour. Preliminary results are also given for a conventional IPVD system used for the deposition of Ti-based biomaterials.

Citovat

BRETAGNE, Jean; Ludovic DE POUCQUES; Caroline BOISSE-LAPORTE; Gerard GOUSSET; Marie-Christine HUGON; Jean-Christophe IMBERT; Olivier LEROY; Lionel TEULÉ-GAY; Michel TOUZEAU a Petr VAŠINA. Recent Developments on Ionized Physical Vapour Deposition: Concepts, Determination of the Ionization Efficiency and Improvement of Deposited Films. In Nanostructured Thin Films and Nanodispersion Strengthened Coating. Netherland: Springer, Kluwer Academic Publisher, 2004, s. 113-122, 9 s. NATO Science Series II, Vol 155. ISBN 1-4020-2220-4.

@inbook{558619,
   author = {Bretagne, Jean and de Poucques, Ludovic and BoisseandLaporte, Caroline and Gousset, Gerard and Hugon, MarieandChristine and Imbert, JeanandChristophe and Leroy, Olivier and TeuléandGay, Lionel and Touzeau, Michel and Vašina, Petr},
   address = {Netherland},
   booktitle = {Nanostructured Thin Films and Nanodispersion Strengthened Coating},
   keywords = {IPVD; magnetron discharge; absorption spectroscopy; deposition},
   language = {eng},
   location = {Netherland},
   isbn = {1-4020-2220-4},
   pages = {113-122},
   publisher = {Springer, Kluwer Academic Publisher},
   title = {Recent Developments on Ionized Physical Vapour Deposition: Concepts, Determination of the Ionization Efficiency and Improvement of Deposited Films},
   year = {2004}
}

TY  - CHAP
ID  - 558619
AU  - Bretagne, Jean - de Poucques, Ludovic - Boisse-Laporte, Caroline - Gousset, Gerard - Hugon, Marie-Christine - Imbert, Jean-Christophe - Leroy, Olivier - Teulé-Gay, Lionel - Touzeau, Michel - Vašina, Petr
PY  - 2004
TI  - Recent Developments on Ionized Physical Vapour Deposition: Concepts, Determination of the Ionization Efficiency and Improvement of Deposited Films
VL  - NATO Science Series II, Vol 155
PB  - Springer, Kluwer Academic Publisher
CY  - Netherland
SN  - 1402022204
KW  - IPVD
KW  - magnetron discharge
KW  - absorption spectroscopy
KW  - deposition
N2  - While most of IPVD reactors use radio frequency coil to create additional ionization, we developed an alternative technique in which the ionization of the emitted sputtered vapor is archived by two microwave antennas. Langmuir probe measurement were used to determine electronic density and temperature. Optical emission and absorption spectroscopy has been performed to determine the ionized fraction of the sputtered vapour. Preliminary results are also given for a conventional IPVD system used for the deposition of Ti-based biomaterials.
ER  -

BRETAGNE, Jean; Ludovic DE POUCQUES; Caroline BOISSE-LAPORTE; Gerard GOUSSET; Marie-Christine HUGON; Jean-Christophe IMBERT; Olivier LEROY; Lionel TEULÉ-GAY; Michel TOUZEAU a Petr VAŠINA. Recent Developments on Ionized Physical Vapour Deposition: Concepts, Determination of the Ionization Efficiency and Improvement of Deposited Films. In \textit{Nanostructured Thin Films and Nanodispersion Strengthened Coating}. Netherland: Springer, Kluwer Academic Publisher, 2004, s.~113-122, 9 s. NATO Science Series II, Vol 155. ISBN~1-4020-2220-4.

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