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@inproceedings{562638,
author = {Šmíd, Radek and Janča, Jan and Zajíčková, Lenka},
address = {Praha},
booktitle = {WDS'04 Proceedings of Contributed papers, Part II},
keywords = {Langmuir probe; Ion energy distribution; concentration profiles},
language = {eng},
location = {Praha},
isbn = {80-86732-32-0},
pages = {333-338},
publisher = {MATFYZPRESS},
title = {Ion and Probe Measurements in rf Capacitive Discharges in Argon and Nitrogen},
year = {2004}
}
TY - JOUR
ID - 562638
AU - Šmíd, Radek - Janča, Jan - Zajíčková, Lenka
PY - 2004
TI - Ion and Probe Measurements in rf Capacitive Discharges in Argon and Nitrogen
PB - MATFYZPRESS
CY - Praha
SN - 8086732320
KW - Langmuir probe
KW - Ion energy distribution
KW - concentration profiles
N2 - We used Langmuir probe and Balzers PPM to determine electron concentration, energy of ions and plasma potential in Ar and N2 discharge. Both diagnostic devices were oriented parallel. The movable electrodes allow a perpendicular spatially resolved measurements. The ion energy distribution (IED) measured at the high power is the same as at the grounded electrode. It exhibited only one peak which was typically found for low voltage modulated r.f. sheaths (the case of grounded electrode). The mean energy of Ar+ and N2+ ions was about 92~\% of the energy related to the plasma potential. Moreover, low energy electron tail appeared in their IEDs. These both facts are explained by collisions in the sheath. Not observed effect of collisions in N+ ions IEDs. The ion mean energies decreased towards the grounded electrodes in agreement with the plasma potential. The ion and electron concentrations showed similar profiles (maximum about 12~mm above the grounded electrode).
ER -
ŠMÍD, Radek, Jan JANČA and Lenka ZAJÍČKOVÁ. Ion and Probe Measurements in rf Capacitive Discharges in Argon and Nitrogen. In \textit{WDS'04 Proceedings of Contributed papers, Part II}. Praha: MATFYZPRESS, 2004, p.~333-338. ISBN~80-86732-32-0.
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