GANCIU, Mihai, Stephanos KONSTANTINIDIS, Y PAINT, Jean Pierre DAUCHOT, M HECQ, Ludovic POUCQUES, Petr VAŠINA, Marcel MEŠKO, Jean-Chrispophe IMBERT, Jean BRETAGNE a Michel TOUZEAU. Preionised pulsed magnetron discharge for ionised physical vapour deposition. In Proceeding of Seventeenth European Conference on Atomic & Molecular Physics of Ionized Gases. Constanta, 2004, s. 227-228. |
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@inproceedings{564311, author = {Ganciu, Mihai and Konstantinidis, Stephanos and Paint, Y and Dauchot, Jean Pierre and Hecq, M and Poucques, Ludovic and Vašina, Petr and Meško, Marcel and Imbert, JeanandChrispophe and Bretagne, Jean and Touzeau, Michel}, address = {Constanta}, booktitle = {Proceeding of Seventeenth European Conference on Atomic & Molecular Physics of Ionized Gases}, keywords = {pulsed magnetron discharge preionization deposition}, location = {Constanta}, pages = {227-228}, title = {Preionised pulsed magnetron discharge for ionised physical vapour deposition}, year = {2004} }
TY - JOUR ID - 564311 AU - Ganciu, Mihai - Konstantinidis, Stephanos - Paint, Y - Dauchot, Jean Pierre - Hecq, M - Poucques, Ludovic - Vašina, Petr - Meško, Marcel - Imbert, Jean-Chrispophe - Bretagne, Jean - Touzeau, Michel PY - 2004 TI - Preionised pulsed magnetron discharge for ionised physical vapour deposition CY - Constanta KW - pulsed magnetron discharge preionization deposition N2 - To improve the quality of thin film deposition by magnetron discharges, particularly by an effective ionisation of sputtered vapour, we developed a new ionised physical vapour deposition method based on preionised magnetron discharges. By superposition of continuous, microwave or RF discharge, with a fast pulsed abnormal discharge, target current density is extended to very high values during short pulses. ER -
GANCIU, Mihai, Stephanos KONSTANTINIDIS, Y PAINT, Jean Pierre DAUCHOT, M HECQ, Ludovic POUCQUES, Petr VAŠINA, Marcel MEŠKO, Jean-Chrispophe IMBERT, Jean BRETAGNE a Michel TOUZEAU. Preionised pulsed magnetron discharge for ionised physical vapour deposition. In \textit{Proceeding of Seventeenth European Conference on Atomic \&{} Molecular Physics of Ionized Gases}. Constanta, 2004, s.~227-228.
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