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@inproceedings{564975,
author = {Dvořák, Pavel and Jánský, Jaroslav and Zajíčková, Lenka and Janča, Jan},
address = {Podbanské},
booktitle = {SAPP XV - Book of contributed papers},
keywords = {IEDF hydrogen capacitive plasma low-pressure},
language = {eng},
location = {Podbanské},
isbn = {80-223-2018-8},
pages = {151-152},
publisher = {Comenius University Press},
title = {Energy Spectra of Ions in the Hydrogen Capacitively Coupled Low-Pressure Discharge},
year = {2005}
}
TY - JOUR
ID - 564975
AU - Dvořák, Pavel - Jánský, Jaroslav - Zajíčková, Lenka - Janča, Jan
PY - 2005
TI - Energy Spectra of Ions in the Hydrogen Capacitively Coupled Low-Pressure Discharge
PB - Comenius University Press
CY - Podbanské
SN - 8022320188
KW - IEDF hydrogen capacitive plasma low-pressure
N2 - The IEDFs of ions flowing from hydrogen asymmetric capacitively coupled low-pressure discharge were measured. The dependencies of their shapes and integrals on the measurement position are presented.
ER -
DVOŘÁK, Pavel, Jaroslav JÁNSKÝ, Lenka ZAJÍČKOVÁ a Jan JANČA. Energy Spectra of Ions in the Hydrogen Capacitively Coupled Low-Pressure Discharge. In \textit{SAPP XV - Book of contributed papers}. Podbanské: Comenius University Press, 2005, s.~151-152. ISBN~80-223-2018-8.
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