KANICKÝ, Viktor, Hans-Rudolf KUHN a Detlef GUENTHER. Depth profile studies of ZrTiN coatings by laser ablation inductively coupled plasma mass spectrometry. Analytical and Bioanalytical Chemistry. Heidelberg: Springer-Verlag GmbH, 2004, roč. 380, č. 2, s. 218 - 226. ISSN 1618-2642.
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Základní údaje
Originální název Depth profile studies of ZrTiN coatings by laser ablation inductively coupled plasma mass spectrometry
Název česky Studium hloubkovch profil plazmov deponovanch povlak ZrTiN pomoc laserov ablace s hmotnostn spektrometri v indukn vzanm plazmatu
Autoři KANICKÝ, Viktor (203 Česká republika, garant), Hans-Rudolf KUHN (756 Švýcarsko) a Detlef GUENTHER (756 Švýcarsko).
Vydání Analytical and Bioanalytical Chemistry, Heidelberg, Springer-Verlag GmbH, 2004, 1618-2642.
Další údaje
Originální jazyk angličtina
Typ výsledku Článek v odborném periodiku
Obor 10406 Analytical chemistry
Stát vydavatele Německo
Utajení není předmětem státního či obchodního tajemství
Impakt faktor Impact factor: 2.098
Kód RIV RIV/00216224:14310/04:00011020
Organizační jednotka Přírodovědecká fakulta
UT WoS 000224528900007
Klíčová slova anglicky Laser ablation - Inductively coupled plasma mass spectrometry - Excimer laser - Beam homogenizer - ZrTiN - Coating - Depth profiling - Depth resolution - Aspect ratio
Změnil Změnil: prof. RNDr. Viktor Kanický, DrSc., učo 408. Změněno: 28. 6. 2007 16:36.
Anotace
Abstract Feasibility of depth profiling was studied using a 193 nm ArF* excimer laser ablation system (GeoLas, MicroLas, Goettingen, Germany) with the lens-array-based beam homogenizer in combination with ICP-QMS Agilent 7500. Two ablation cells (20 cm3 and 1.5 cm3) were compared at the laser repetition rate of 1Hz, laser beam energy of 135 mJ and the carrier gas flow rate 1.5 L/min He + 0.78 L/min Ar. Dimensions of ablation cell are important parameters for signal tailing, however; very small cell volumes (e.g. 1.5 cm3) may cause memory effects, which can be probably explained by dominant inertial losses of aerosol on cell walls with its delayed mobilization. The 20-cm3-ablation cell seems to be appropriate for depth profiling by continuous single-hole drilling. The study of influence of the pit diameter magnitude on courses of waning and emerging signals under small crater depth/diameter aspect ratio, which ranges between 0.75 and 0.0375 for the 3-ěm thick coatings and pit diameters 4-80 ěm, revealed that the steady-state signals of pure coating and pure substrate (out of interface) were obtained at crater diameters between 20-40 ěm. Depth resolution defined by means of slopes of tangents in the layer interface region depends on the pit diameter with optimum in the range of 20-40 ěm and makes 0.6 ěm for 20-ěm pit. In-depth variation of concentration of coating constituent (Ti) was proved almost identically using two different laser/ICP systems.
Anotace česky
Abstract Feasibility of depth profiling was studied using a 193 nm ArF* excimer laser ablation system (GeoLas, MicroLas, Goettingen, Germany) with the lens-array-based beam homogenizer in combination with ICP-QMS Agilent 7500. Two ablation cells (20 cm3 and 1.5 cm3) were compared at the laser repetition rate of 1Hz, laser beam energy of 135 mJ and the carrier gas flow rate 1.5 L/min He + 0.78 L/min Ar. Dimensions of ablation cell are important parameters for signal tailing, however; very small cell volumes (e.g. 1.5 cm3) may cause memory effects, which can be probably explained by dominant inertial losses of aerosol on cell walls with its delayed mobilization. The 20-cm3-ablation cell seems to be appropriate for depth profiling by continuous single-hole drilling. The study of influence of the pit diameter magnitude on courses of waning and emerging signals under small crater depth/diameter aspect ratio, which ranges between 0.75 and 0.0375 for the 3-ěm thick coatings and pit diameters 4-80 ěm, revealed that the steady-state signals of pure coating and pure substrate (out of interface) were obtained at crater diameters between 20-40 ěm. Depth resolution defined by means of slopes of tangents in the layer interface region depends on the pit diameter with optimum in the range of 20-40 ěm and makes 0.6 ěm for 20-ěm pit. In-depth variation of concentration of coating constituent (Ti) was proved almost identically using two different laser/ICP systems.
Návaznosti
MSM 143100003, záměrNázev: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Výzkumné záměry
VytisknoutZobrazeno: 25. 2. 2021 12:58