| BURŠÍKOVÁ, Vilma, Petr KLAPETEK, Angelique BOUSQUET and Marek ELIÁŠ. Study of the mechanical properties of thin films using combined nanoindentation and AFM measurements. Jemná mechanika a optika. Přerov: Physical Institute, ASCR, 2005, vol. 50, 11_12, p. 323-326. ISSN 0447-6441. |
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@article{593724,
author = {Buršíková, Vilma and Klapetek, Petr and Bousquet, Angelique and Eliáš, Marek},
article_location = {Přerov},
article_number = {11_12},
keywords = {nanoindentation; AFM; thin films; mechanical properties},
language = {eng},
issn = {0447-6441},
journal = {Jemná mechanika a optika},
title = {Study of the mechanical properties of thin films using combined nanoindentation and AFM measurements},
volume = {50},
year = {2005}
}
TY - JOUR
ID - 593724
AU - Buršíková, Vilma - Klapetek, Petr - Bousquet, Angelique - Eliáš, Marek
PY - 2005
TI - Study of the mechanical properties of thin films using combined nanoindentation and AFM measurements
JF - Jemná mechanika a optika
VL - 50
IS - 11_12
SP - 323-326
EP - 323-326
PB - Physical Institute, ASCR
SN - 04476441
KW - nanoindentation
KW - AFM
KW - thin films
KW - mechanical properties
N2 - Study of the mechanical properties of thin films prepared by PECVD using combined nanoindentation and AFM measurements.
ER -
BURŠÍKOVÁ, Vilma, Petr KLAPETEK, Angelique BOUSQUET and Marek ELIÁŠ. Study of the mechanical properties of thin films using combined nanoindentation and AFM measurements. \textit{Jemná mechanika a optika}. Přerov: Physical Institute, ASCR, 2005, vol.~50, 11\_{}12, p.~323-326. ISSN~0447-6441.
|
