VAŠINA, Petr, Marcel MEŠKO, Mihai GANCIU, Jean BRETAGNE, Caroline BOISSE-LAPORTE, Ludovic DE POUCQUES a Michel TOUZEAU. Reduction of transient regime in fast preionized high power pulsed magnetron discharge. Europhysics Letters. Paríž: European Physical Society, 2005, roč. 72, č. 3, s. 390-395, 5 s. ISSN 0295-5075. |
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@article{599364, author = {Vašina, Petr and Meško, Marcel and Ganciu, Mihai and Bretagne, Jean and BoisseandLaporte, Caroline and de Poucques, Ludovic and Touzeau, Michel}, article_location = {Paríž}, article_number = {3}, keywords = {pulsed magnetron; sputtering; preionization}, language = {eng}, issn = {0295-5075}, journal = {Europhysics Letters}, title = {Reduction of transient regime in fast preionized high power pulsed magnetron discharge}, volume = {72}, year = {2005} }
TY - JOUR ID - 599364 AU - Vašina, Petr - Meško, Marcel - Ganciu, Mihai - Bretagne, Jean - Boisse-Laporte, Caroline - de Poucques, Ludovic - Touzeau, Michel PY - 2005 TI - Reduction of transient regime in fast preionized high power pulsed magnetron discharge JF - Europhysics Letters VL - 72 IS - 3 SP - 390-395 EP - 390-395 PB - European Physical Society SN - 02955075 KW - pulsed magnetron KW - sputtering KW - preionization N2 - A high-power pulsed-magnetron discharge (several kW/cm2)is described. It operates at pulse duration of the order of few ľs, signicantly shorter than in usual similar devices. The breakdown delay was reduced by using a low-current DC preionization. The study was performed for Cu target in Ar and He bufer gases by optical emission spectroscopy and electrical measurements. Saturation magnetron current is reached in a few ľs which permits to shorten the pulse duration avoiding arc formation. Unusual high current density up to 10A/cm2 induces very fast transition toward the stable self-sputtering regime. High plasma density favours high ion ux to the substrate. Preliminary result on Cu deposit in trenches is reported. ER -
VAŠINA, Petr, Marcel MEŠKO, Mihai GANCIU, Jean BRETAGNE, Caroline BOISSE-LAPORTE, Ludovic DE POUCQUES a Michel TOUZEAU. Reduction of transient regime in fast preionized high power pulsed magnetron discharge. \textit{Europhysics Letters}. Paríž: European Physical Society, 2005, roč.~72, č.~3, s.~390-395, 5 s. ISSN~0295-5075.
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