| MEDUŇA, Mojmír, Jiří NOVÁK, Claudiu FALUB, Gang CHEN, Günther BAUER, Soichiro TSUJINO, Detlev GRÜTZMACHER, Elisabeth MÜLLER, Yves CAMPIDELLI, Olivier KERMARREC, Daniel BENSAHEL a Norbert SCHELL. High temperature investigations of Si/SiGe based cascade structures using x-ray scattering methods. J. Phys. D: Appl. Phys. Bristol, UK: IOP Publishing, Ltd., 2005, roč. 38, 10A, s. A121-A125, 5 s. ISSN 0022-3727. |
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@article{617865,
author = {Meduňa, Mojmír and Novák, Jiří and Falub, Claudiu and Chen, Gang and Bauer, Günther and Tsujino, Soichiro and Grützmacher, Detlev and Müller, Elisabeth and Campidelli, Yves and Kermarrec, Olivier and Bensahel, Daniel and Schell, Norbert},
article_location = {Bristol, UK},
article_number = {10A},
keywords = {X-ray reflectivity; SiGe; Annealing; Diffusion},
language = {eng},
issn = {0022-3727},
journal = {J. Phys. D: Appl. Phys.},
title = {High temperature investigations of Si/SiGe based cascade structures using x-ray scattering methods},
volume = {38},
year = {2005}
}
TY - JOUR
ID - 617865
AU - Meduňa, Mojmír - Novák, Jiří - Falub, Claudiu - Chen, Gang - Bauer, Günther - Tsujino, Soichiro - Grützmacher, Detlev - Müller, Elisabeth - Campidelli, Yves - Kermarrec, Olivier - Bensahel, Daniel - Schell, Norbert
PY - 2005
TI - High temperature investigations of Si/SiGe based cascade structures using x-ray scattering methods
JF - J. Phys. D: Appl. Phys.
VL - 38
IS - 10A
SP - A121-A125
EP - A121-A125
PB - IOP Publishing, Ltd.
SN - 00223727
KW - X-ray reflectivity
KW - SiGe
KW - Annealing
KW - Diffusion
N2 - Temperature stability of SiGe/Si (80% Ge) structures was studied using x-ray reflectivity during in-situ annealing around temperature 790C.
ER -
MEDUŇA, Mojmír, Jiří NOVÁK, Claudiu FALUB, Gang CHEN, Günther BAUER, Soichiro TSUJINO, Detlev GRÜTZMACHER, Elisabeth MÜLLER, Yves CAMPIDELLI, Olivier KERMARREC, Daniel BENSAHEL a Norbert SCHELL. High temperature investigations of Si/SiGe based cascade structures using x-ray scattering methods. \textit{J. Phys. D: Appl. Phys.}. Bristol, UK: IOP Publishing, Ltd., 2005, roč.~38, 10A, s.~A121-A125, 5 s. ISSN~0022-3727.
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