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@inproceedings{634088,
author = {Laserna, Javier and Cabalin, Luisa and Čtvrtníčková, Tereza and Fortes, Fran},
address = {Aachen, Germany},
booktitle = {EMSLIBS 2005},
keywords = {LIBS; nanometric; depth profiling},
language = {eng},
location = {Aachen, Germany},
pages = {52-52},
publisher = {Fraunhofer Institut Lasertechnik},
title = {Nanometric sampling depth and depth profiling of multilayered metal samples with LIBS},
year = {2005}
}
TY - JOUR
ID - 634088
AU - Laserna, Javier - Cabalin, Luisa - Čtvrtníčková, Tereza - Fortes, Fran
PY - 2005
TI - Nanometric sampling depth and depth profiling of multilayered metal samples with LIBS
PB - Fraunhofer Institut Lasertechnik
CY - Aachen, Germany
KW - LIBS
KW - nanometric
KW - depth profiling
N2 - The main aim of this work was to improve the depth resolution of multilayered samples applying an optical restriction to the laser beam between the focusing lens and the sample. Although the craters continue to have conical shapes, we have observed atomic emission only from the central region of the plume. The average ablation rates and depth profiles of various metals (Cr, Ni, Cu) in multilayered samples were studied by LIBS. The microplasma was created on the sample by a Nd:YAG laser doubled in frequency to 532 nm with a homogeneous distribution of energy. Light emitted by the microplasma was detected with an iCCD multichannal detector. The sample defocusing effect was studied to reach the optimal ablation in range of few nanometers per pulse. In the experiment, the optical restrictions (pinholes of various diameters) were used to improve the depth profile.
ER -
LASERNA, Javier, Luisa CABALIN, Tereza ČTVRTNÍČKOVÁ a Fran FORTES. Nanometric sampling depth and depth profiling of multilayered metal samples with LIBS. In \textit{EMSLIBS 2005}. Aachen, Germany: Fraunhofer Institut Lasertechnik, 2005, s.~52-52.
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