EITZINGER, Christian, Jan FIKAR, Christian FORSICH a Josef HUMLÍČEK. Spectroscopic Ellipsometry as a Tool for On-Line Monitoring and Control of Surface Treatment Processes. Materials Science Forum. Trans Tech Publications, 2006, roč. 518, č. 4, s. 423-430. ISSN 0255-5476. |
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@article{634785, author = {Eitzinger, Christian and Fikar, Jan and Forsich, Christian and Humlíček, Josef}, article_number = {4}, keywords = {surface treatment; spectroscopic ellipsometry; on-line monitor; closed loop control; nitriding}, language = {eng}, issn = {0255-5476}, journal = {Materials Science Forum}, title = {Spectroscopic Ellipsometry as a Tool for On-Line Monitoring and Control of Surface Treatment Processes}, volume = {518}, year = {2006} }
TY - JOUR ID - 634785 AU - Eitzinger, Christian - Fikar, Jan - Forsich, Christian - Humlíček, Josef PY - 2006 TI - Spectroscopic Ellipsometry as a Tool for On-Line Monitoring and Control of Surface Treatment Processes JF - Materials Science Forum VL - 518 IS - 4 SP - 423 EP - 423 PB - Trans Tech Publications SN - 02555476 KW - surface treatment KW - spectroscopic ellipsometry KW - on-line monitor KW - closed loop control KW - nitriding N2 - Modern material technology relies increasingly on processes for surface modification and coating. Generally we are lacking a possibility to monitor the progress of such processes. Thus the outcome can only be analyzed after the end of the whole process cycle. We are proposing to use spectroscopic ellipsometry (SE) as an on-line monitoring tool. As an optical method, SE is not affected by high temperatures, process gases, plasmas, etc. SE can be used as a monitoring tool or a sensor for closed loop control of processes. The main difficulty is the on line interpretation of SE data. Depending on the nature of the process monitored or controlled, different models are used for the interpretation. These models predict the SE response depending on different parameters describing the surface under investigation. A fitting process is used to solve the inverse problem, i.e. extracting material data from the SE spectra. We expect increased process stability and shorter development time as a practical benefit from the use of SE. ER -
EITZINGER, Christian, Jan FIKAR, Christian FORSICH a Josef HUMLÍČEK. Spectroscopic Ellipsometry as a Tool for On-Line Monitoring and Control of Surface Treatment Processes. \textit{Materials Science Forum}. Trans Tech Publications, 2006, roč.~518, č.~4, s.~423-430. ISSN~0255-5476.
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