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@article{755355,
author = {Mikula, Marián and Grančič, Branislav and Buršíková, Vilma and Csuba, Adrián and Držík, Milan and Kavecký, Štefan and Plecenik, Andrej and Kúš, Peter},
article_location = {USA},
article_number = {2},
keywords = {Magnetron sputtering; Superhard coatings; Mechanical properties; Residual stresses},
language = {eng},
issn = {0042-207X},
journal = {Vacuum},
title = {Mechanical properties of superhard TiB2 coatings prepared by DC magnetron sputtering},
volume = {82},
year = {2007}
}
TY - JOUR
ID - 755355
AU - Mikula, Marián - Grančič, Branislav - Buršíková, Vilma - Csuba, Adrián - Držík, Milan - Kavecký, Štefan - Plecenik, Andrej - Kúš, Peter
PY - 2007
TI - Mechanical properties of superhard TiB2 coatings prepared by DC magnetron sputtering
JF - Vacuum
VL - 82
IS - 2
SP - 278-281
EP - 278-281
PB - ELSEVIER (PERGAMON)
SN - 0042207X
KW - Magnetron sputtering
KW - Superhard coatings
KW - Mechanical properties
KW - Residual stresses
N2 - Superhard titanium diboride (TiB2) coatings (Hv> 40 GPa) were deposited in Ar atmosphere from stoichiometric TiB2 target using an unbalanced direct current (d. c.) magnetron. Polished Si (0 0 1), stainless steel, high speed steel (HSS) and tungsten carbide (WC) substrates were used for deposition. The influence of negative substrate bias, Us, and substrate temperature, Ts, on mechanical properties of TiB2 coatings was studied. X ray diffraction (XRD) analysis showed hexagonal TiB2 structure with (0 0 0 1) preferred orientation. The texture of TiB2 coatings was dependent upon the ion bombardment (Us increased from 0 to minus 300 V) and the substrate heating (Ts increased from room temperature (RT) to 700 C). All TiB2 coatings were measured using microhardness tester Fischerscope H100 equipped with Vickers and Berkovich diamond indenters and exhibited high values of hardness Hv up to 34 GPa, effective Young's modulus ranging from 450 to 600 GPa; here E and nu are the Young's modulus and Poisson's ratio, respectively, and elastic recovery We 80%. TiB2 coating with a maximum hardness Hv 73 GPa and E* 580 GPa was sputtered at Us=minus200 V and Ts=RT. Macrostresses of coatings sigma were measured by an optical wafer curvature technique and evaluated by Stoney equation. All TiB2 coatings exhibited compressive macrostresses.
ER -
MIKULA, Marián, Branislav GRANČIČ, Vilma BURŠÍKOVÁ, Adrián CSUBA, Milan DRŽÍK, Štefan KAVECKÝ, Andrej PLECENIK a Peter KÚŠ. Mechanical properties of superhard TiB2 coatings prepared by DC magnetron sputtering. \textit{Vacuum}. USA: ELSEVIER (PERGAMON), 2007, roč.~82, č.~2, s.~278-281. ISSN~0042-207X.
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