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@inproceedings{774025, author = {Vašina, Petr and Hytková, Tereza and Eliáš, Marek}, address = {Granada}, booktitle = {19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases - Book of Abstracts}, keywords = {reactive magnetron sputering; target}, language = {eng}, location = {Granada}, isbn = {2-914771-04-5}, pages = {165-166}, publisher = {European Physical Society}, title = {Modeling of Radial Variation of Target Poisoning During Reactive Sputtering Deposition Process}, year = {2008} }
TY - JOUR ID - 774025 AU - Vašina, Petr - Hytková, Tereza - Eliáš, Marek PY - 2008 TI - Modeling of Radial Variation of Target Poisoning During Reactive Sputtering Deposition Process PB - European Physical Society CY - Granada SN - 2914771045 KW - reactive magnetron sputering KW - target N2 - Modeling of Radial Variation of Target Poisoning During Reactive Sputtering Deposition Process, proceeding, interdisciplinary study of plasma physics ER -
VAŠINA, Petr, Tereza HYTKOVÁ a Marek ELIÁŠ. Modeling of Radial Variation of Target Poisoning During Reactive Sputtering Deposition Process. In \textit{19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases - Book of Abstracts}. Granada: European Physical Society. s.~165-166. ISBN~2-914771-04-5. 2008.
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