Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD

KELAR, Lukáš, Vilma BURŠÍKOVÁ and Zdeněk BOCHNÍČEK. Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD. In CESPC II - Book of extended abstracts. Brno, Czech Republic: Masaryk University, Brno, 2008, p. 106-107.

Basic information

• Original name: Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD
• Name in Czech: Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD
• Authors: KELAR, Lukáš, Vilma BURŠÍKOVÁ and Zdeněk BOCHNÍČEK.
• Edition: Brno, Czech Republic, CESPC II - Book of extended abstracts, p. 106-107, 2 pp. 2008.
• Publisher: Masaryk University, Brno

Other information

• Original language: English
• Type of outcome: Proceedings paper
• Field of Study: 10305 Fluids and plasma physics
• Country of publisher: Czech Republic
• Confidentiality degree: is not subject to a state or trade secret
• Organization unit: Faculty of Science
• UT WoS: 000208452600039
• Keywords in English: carbon films ;PECVD
• Tags: carbon films, PECVD

Abstract

Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD

Abstract (in Czech)

Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD

Links

• GA106/05/0274, research and development project: Name: Víceúrovňové studium vztahů mezi mechanickými a mikrostrukturními charakteristikami materiálů

Investor: Czech Science Foundation, Multiscale approach to relationships between mechanical and microstructural characteristics of materials

• GA202/07/1669, research and development project: Name: Depozice termomechanicky stabilních nanostrukturovaných diamantu-podobných tenkých vrstev ve dvojfrekvenčních kapacitních výbojích

Investor: Czech Science Foundation, Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges

• MSM0021622411, plan (intention): Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface