Higher harmonic frequencies measured in Capacitively Coupled Plasma
DVOŘÁK, Pavel and Zdeněk MORAVEC. Higher harmonic frequencies measured in Capacitively Coupled Plasma. In 2nd CESPC - Book of extended abstracts. Brno: Ústav fyzikální elektroniky (PřF MU), JČM, 2008, p. 74. |
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Basic information | |
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Original name | Higher harmonic frequencies measured in Capacitively Coupled Plasma |
Name in Czech | Vyšší harmonické frekvence měřené v kapacitně vázaném plazmatu |
Authors | DVOŘÁK, Pavel (203 Czech Republic, guarantor) and Zdeněk MORAVEC (203 Czech Republic). |
Edition | Brno, 2nd CESPC - Book of extended abstracts, p. 74-74, 2008. |
Publisher | Ústav fyzikální elektroniky (PřF MU), JČM |
Other information | |
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Original language | English |
Type of outcome | Proceedings paper |
Field of Study | 10305 Fluids and plasma physics |
Country of publisher | Czech Republic |
Confidentiality degree | is not subject to a state or trade secret |
RIV identification code | RIV/00216224:14310/08:00027077 |
Organization unit | Faculty of Science |
Keywords in English | plasma; higher harmonics |
Tags | higher harmonics, plasma |
Changed by | Changed by: doc. Mgr. Pavel Dvořák, Ph.D., učo 16711. Changed: 22/12/2008 11:27. |
Abstract |
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Measurement of higher harmonic frequencies in low-pressure capacitive discharge and dependence of their amplitudes on the matching unit parameters. |
Abstract (in Czech) |
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Měření vyšších harmonických frekvencí v nízkotlakém kapacitně vázaném výboji a závislost jejich amplitud na parametrech přizpůsobovacího členu. |
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MSM0021622411, plan (intention) | Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek |
Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface |
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