| SCHMIDTOVÁ, Tereza, Petr VAŠINA a Marek ELIÁŠ. Advanced modeling of reactive sputtering process with non-linear discharge current density. Chemické Listy. 2008, roč. 102, č. 1, s. s1376-s1379, 4 s. ISSN 1803-2389. |
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@article{800629,
author = {Schmidtová, Tereza and Vašina, Petr and Eliáš, Marek},
article_number = {1},
keywords = {reactive magnetron sputtering},
language = {eng},
issn = {1803-2389},
journal = {Chemické Listy},
title = {Advanced modeling of reactive sputtering process with non-linear discharge current density},
volume = {102},
year = {2008}
}
TY - JOUR
ID - 800629
AU - Schmidtová, Tereza - Vašina, Petr - Eliáš, Marek
PY - 2008
TI - Advanced modeling of reactive sputtering process with non-linear discharge current density
JF - Chemické Listy
VL - 102
IS - 1
SP - s1376-s1379
EP - s1376-s1379
SN - 18032389
KW - reactive magnetron sputtering
N2 - Advanced modeling of reactive sputtering process with non-linear discharge current density, paper, interdisciplinary study of plasma physics, magnetron discharges
ER -
SCHMIDTOVÁ, Tereza, Petr VAŠINA a Marek ELIÁŠ. Advanced modeling of reactive sputtering process with non-linear discharge current density. \textit{Chemické Listy}. 2008, roč.~102, č.~1, s.~s1376-s1379, 4 s. ISSN~1803-2389.
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