| BURSIKOVA, Vilma, Pavel STAHEL, Jaroslav SOBOTA, Jan GROSSMAN, Tomas FORT, Zdenek BOCHNICEK, Petr KLAPETEK, Jiri BURSIK a Vratislav PERINA. Study of thermal stability of Silicon, Oxygen and/or Nitrogen containing Diamon-like Carbon coatings. In 2nd conference on New Diamond and Nano Carbons 2008. 2008. |
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@proceedings{808465,
author = {Bursikova, Vilma and Stahel, Pavel and Sobota, Jaroslav and Grossman, Jan and Fort, Tomas and Bochnicek, Zdenek and Klapetek, Petr and Bursik, Jiri and Perina, Vratislav},
booktitle = {2nd conference on New Diamond and Nano Carbons 2008},
keywords = {Study; thermal stability; Silicon; Oxygen; Nitrogen; Diamon-like Carbon coatings},
language = {eng},
title = {Study of thermal stability of Silicon, Oxygen and/or Nitrogen containing Diamon-like Carbon coatings},
year = {2008}
}
TY - CONF
ID - 808465
AU - Bursikova, Vilma - Stahel, Pavel - Sobota, Jaroslav - Grossman, Jan - Fort, Tomas - Bochnicek, Zdenek - Klapetek, Petr - Bursik, Jiri - Perina, Vratislav
PY - 2008
TI - Study of thermal stability of Silicon, Oxygen and/or Nitrogen containing Diamon-like Carbon coatings
KW - Study
KW - thermal stability
KW - Silicon
KW - Oxygen
KW - Nitrogen
KW - Diamon-like Carbon coatings
N2 - The thermomechanical stability of diamond-like protective (DLC) films play a crucial role for their technological application and its study is of great importance. The main disadvantages of amorphous hydrogenated carbon (a-C:H) films prepared using PECVD are their low thermomechanical stability (due to hydrogen loss and graphitization at temperatures exceeding 300 C). After achieving this temperature the thermal degradation process starts due to the graphitization caused by hydrogen losses.
ER -
BURSIKOVA, Vilma, Pavel STAHEL, Jaroslav SOBOTA, Jan GROSSMAN, Tomas FORT, Zdenek BOCHNICEK, Petr KLAPETEK, Jiri BURSIK a Vratislav PERINA. Study of thermal stability of Silicon, Oxygen and/or Nitrogen containing Diamon-like Carbon coatings. In \textit{2nd conference on New Diamond and Nano Carbons 2008}. 2008.
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