Laser ablation time-of-flight mass spectrometry (LA-TOF-MS) of silicon doped diamond-like carbon (DLC-Si)

HOUŠKA, Jan, Vilma BURŠÍKOVÁ and Josef HAVEL. Laser ablation time-of-flight mass spectrometry (LA-TOF-MS) of silicon doped diamond-like carbon (DLC-Si). In Frontiers in Low Temperature Plasma Diagnostics 8. 1st ed. Brno: JČMF, 2009, p. 46. ISBN 978-80-214-3875-0.

Basic information

Original name

Laser ablation time-of-flight mass spectrometry (LA-TOF-MS) of silicon doped diamond-like carbon (DLC-Si)

Name in Czech

Laser ablation time-of-flight mass spectrometry (LA-TOF-MS) of silicon doped diamond-like carbon (DLC-Si)

Authors

HOUŠKA, Jan, Vilma BURŠÍKOVÁ and Josef HAVEL

Edition

1. vyd. Brno, Frontiers in Low Temperature Plasma Diagnostics 8, p. 46-46, 2009

Publisher

JČMF

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Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10302 Condensed matter physics

Country of publisher

Czech Republic

Confidentiality degree

není předmětem státního či obchodního tajemství

Organization unit

Faculty of Science

ISBN

978-80-214-3875-0

Keywords (in Czech)

Laser ablation; time-of-flight mass spectrometry; silicon doped diamond-like carbon

Keywords in English

Laser ablation; time-of-flight mass spectrometry; silicon doped diamond-like carbon

Tags

laser ablation, silicon doped diamond-like carbon, time-of-flight mass spectrometry

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Abstract

V originále

Silicon-doped diamond-like carbon (DLC-Si) was prepared by plasma-enhanced chemical vapor deposition (PECVD) technique from a mixture of hexamethyldisiloxane (HMDSO) and oxygen using dual frequenci capacitive discharge. Time of flight mass spectrometer equipped with nitrogen laser (337 nm) was used to charakterize its structure via laser ablation. Stoichometry of positively or negatively charged species was confirmed via isotopic pattern simulation. DLC-Si material shows typical spectral patterns similar to those diamond-like carbon. In addition, chemical bound of Si-C in this material was proved and many positively or negatively charged O(m)Si(n)C(o)H(p) species were identified in plasma plume.

In Czech

Silicon-doped diamond-like carbon (DLC-Si) was prepared by plasma-enhanced chemical vapor deposition (PECVD) technique from a mixture of hexamethyldisiloxane (HMDSO) and oxygen using dual frequenci capacitive discharge. Time of flight mass spectrometer equipped with nitrogen laser (337 nm) was used to charakterize its structure via laser ablation. Stoichometry of positively or negatively charged species was confirmed via isotopic pattern simulation. DLC-Si material shows typical spectral patterns similar to those diamond-like carbon. In addition, chemical bound of Si-C in this material was proved and many positively or negatively charged O(m)Si(n)C(o)H(p) species were identified in plasma plume.

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Links

GA202/07/1669, research and development project	Name: Depozice termomechanicky stabilních nanostrukturovaných diamantu-podobných tenkých vrstev ve dvojfrekvenčních kapacitních výbojích Investor: Czech Science Foundation, Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges
KAN311610701, research and development project	Name: Nanometrologie využívající metod rastrovací sondové mikroskopie Investor: Academy of Sciences of the Czech Republic
MSM4977751303, plan (intention)	Name: Predikce poruch heterogenních materiálů, komponent mechanických a biomechanických systémů.