2008
Composition and functional properties of organosilicon plasma polymers from hexamethyldisiloxane and octamethylcyclotetrasiloxane
ZAJÍČKOVÁ, Lenka, Zuzana KUČEROVÁ, Vilma BURŠÍKOVÁ, Daniel FRANTA, Vratislav PEŘINA et. al.Základní údaje
Originální název
Composition and functional properties of organosilicon plasma polymers from hexamethyldisiloxane and octamethylcyclotetrasiloxane
Název česky
Složení a funkční vlastnosti organosilikonových polymerů vytvářených z hexamethyldisiloxanu a octamethylcyclotetrasiloxanu
Autoři
Vydání
WARRENDALE, ORGANIC/INORGANIC HYBRID MATERIALS - 2007, od s. 159-164, 6 s. 2008
Nakladatel
MATERIALS RESEARCH SOCIETY
Další údaje
Jazyk
angličtina
Typ výsledku
Stať ve sborníku
Obor
10305 Fluids and plasma physics
Stát vydavatele
Velká Británie a Severní Irsko
Utajení
není předmětem státního či obchodního tajemství
Organizační jednotka
Přírodovědecká fakulta
ISBN
978-1-55899-967-1
ISSN
UT WoS
000256796400019
Klíčová slova anglicky
THIN-FILMS; HYBRID; DEPOSITION; SILICA; MODEL
Štítky
Příznaky
Mezinárodní význam, Recenzováno
Změněno: 27. 3. 2013 09:19, doc. Mgr. Lenka Zajíčková, Ph.D.
V originále
Hybrid organic-inorganic thin films with different fractions of silicon oxide were deposited in rf capacitively coupled discharges using pure hexamethyldisiloxane (HMDSO), octamethylcyclotetrasiloxane (D4) or 5 % HMDSO in O-2. The deposition in continuous wave (cw) mode was compared with pulsed conditions under which the discharge on-time was 5 ms and the off-time varied from 0.5 to 15 ms. The chemical composition of the films was studied by FTIR, RBS and ERDA. Their optical properties in UV/visible/NIR were determined from spectroscopic ellipsometry and reflectance measurements fitted with a Kramers-Kronig consistent dispersion model based on a parametrization of density of states. Film hardness and reduced modulus were determined from depth sensing indentation tests.
Česky
Hybrid organic-inorganic thin films with different fractions of silicon oxide were deposited in rf capacitively coupled discharges using pure hexamethyldisiloxane (HMDSO), octamethylcyclotetrasiloxane (D4) or 5 % HMDSO in O-2. The deposition in continuous wave (cw) mode was compared with pulsed conditions under which the discharge on-time was 5 ms and the off-time varied from 0.5 to 15 ms. The chemical composition of the films was studied by FTIR, RBS and ERDA. Their optical properties in UV/visible/NIR were determined from spectroscopic ellipsometry and reflectance measurements fitted with a Kramers-Kronig consistent dispersion model based on a parametrization of density of states. Film hardness and reduced modulus were determined from depth sensing indentation tests.
Návaznosti
| MSM0021622411, záměr |
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| 1K05025, projekt VaV |
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