ZAJÍČKOVÁ, Lenka, Zuzana KUČEROVÁ, Vilma BURŠÍKOVÁ, Daniel FRANTA, Vratislav PEŘINA and Anna MACKOVÁ. Composition and functional properties of organosilicon plasma polymers from hexamethyldisiloxane and octamethylcyclotetrasiloxane. In ORGANIC/INORGANIC HYBRID MATERIALS - 2007. WARRENDALE: MATERIALS RESEARCH SOCIETY, 2008, p. 159-164. ISBN 978-1-55899-967-1.
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Basic information
Original name Composition and functional properties of organosilicon plasma polymers from hexamethyldisiloxane and octamethylcyclotetrasiloxane
Name in Czech Složení a funkční vlastnosti organosilikonových polymerů vytvářených z hexamethyldisiloxanu a octamethylcyclotetrasiloxanu
Authors ZAJÍČKOVÁ, Lenka, Zuzana KUČEROVÁ, Vilma BURŠÍKOVÁ, Daniel FRANTA, Vratislav PEŘINA and Anna MACKOVÁ.
Edition WARRENDALE, ORGANIC/INORGANIC HYBRID MATERIALS - 2007, p. 159-164, 6 pp. 2008.
Publisher MATERIALS RESEARCH SOCIETY
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10305 Fluids and plasma physics
Country of publisher United Kingdom of Great Britain and Northern Ireland
Confidentiality degree is not subject to a state or trade secret
Organization unit Faculty of Science
ISBN 978-1-55899-967-1
ISSN 0272-9172
UT WoS 000256796400019
Keywords in English THIN-FILMS; HYBRID; DEPOSITION; SILICA; MODEL
Tags deposition, HYBRID, model, silica, THIN-FILMS
Tags International impact, Reviewed
Changed by Changed by: doc. Mgr. Lenka Zajíčková, Ph.D., učo 1414. Changed: 27/3/2013 09:19.
Abstract
Hybrid organic-inorganic thin films with different fractions of silicon oxide were deposited in rf capacitively coupled discharges using pure hexamethyldisiloxane (HMDSO), octamethylcyclotetrasiloxane (D4) or 5 % HMDSO in O-2. The deposition in continuous wave (cw) mode was compared with pulsed conditions under which the discharge on-time was 5 ms and the off-time varied from 0.5 to 15 ms. The chemical composition of the films was studied by FTIR, RBS and ERDA. Their optical properties in UV/visible/NIR were determined from spectroscopic ellipsometry and reflectance measurements fitted with a Kramers-Kronig consistent dispersion model based on a parametrization of density of states. Film hardness and reduced modulus were determined from depth sensing indentation tests.
Abstract (in Czech)
Hybrid organic-inorganic thin films with different fractions of silicon oxide were deposited in rf capacitively coupled discharges using pure hexamethyldisiloxane (HMDSO), octamethylcyclotetrasiloxane (D4) or 5 % HMDSO in O-2. The deposition in continuous wave (cw) mode was compared with pulsed conditions under which the discharge on-time was 5 ms and the off-time varied from 0.5 to 15 ms. The chemical composition of the films was studied by FTIR, RBS and ERDA. Their optical properties in UV/visible/NIR were determined from spectroscopic ellipsometry and reflectance measurements fitted with a Kramers-Kronig consistent dispersion model based on a parametrization of density of states. Film hardness and reduced modulus were determined from depth sensing indentation tests.
Links
MSM0021622411, plan (intention)Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
1K05025, research and development projectName: Příprava nových Si-O(N)-C materiálů plazmochemickou metodou
Investor: Ministry of Education, Youth and Sports of the CR, Synthesis of new Si-O(N)-C materials by plasmachemical methods
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