Detailed Information on Publication Record
2008
Design and Fabrication of High-Temperature SOI Strain-Gauges
KULHA, P., A. BOURA, M. HUSÁK, Petr MIKULÍK, Milan KUČERA et. al.Basic information
Original name
Design and Fabrication of High-Temperature SOI Strain-Gauges
Name in Czech
Návrh a výroba vysokoteplotních SOI napěťových senzorů
Authors
KULHA, P. (203 Czech Republic), A. BOURA (203 Czech Republic), M. HUSÁK (203 Czech Republic), Petr MIKULÍK (203 Czech Republic, guarantor), Milan KUČERA (203 Czech Republic) and Stanislav VALENDA (203 Czech Republic)
Edition
New York, 7th International Conference on Advanced Semiconductor Devices and Microsystems, p. 175-178, 4 pp. 2008
Publisher
IEEE
Other information
Language
English
Type of outcome
Stať ve sborníku
Field of Study
20201 Electrical and electronic engineering
Country of publisher
United States of America
Confidentiality degree
není předmětem státního či obchodního tajemství
RIV identification code
RIV/00216224:14310/08:00038454
Organization unit
Faculty of Science
ISBN
978-1-4244-2325-5
UT WoS
000263223200039
Keywords (in Czech)
napěťové sensory; senzory tlaku
Keywords in English
High-Temperature SOI Strain-Gauges; sensors
Tags
International impact, Reviewed
Změněno: 15/1/2010 15:36, doc. RNDr. Petr Mikulík, Ph.D.
V originále
The following paper introduces the CoventorWare design environment for SOI based piezoresistive sensor design. Fabrication process and characterization of designed sensors is also presented. The software package Coventor Ware has been used for design of mechanical and electrical characteristics of the structure. The tools enable design, modelling and successive modification of designed MEMS structures. The program enables: drawing of 2D layout and its editing, simulation of production process, generation of 3D model from 2D masks, generation of network by the method of finite elements, solution of mechanical, piezoresistive, thermal and further simulations. Simple passive elements (strain sensitive resistors - piezoresistors) were fabricated on SIMOX SOI substrates with sputtered AlCuSi metallization. Basic parameter extraction and their temperature dependence were performed.
In Czech
Článek je věnován piezorezistivním senzorů. Jejich návrh byl provedený softwarem CoventorWare, který umožnil mehcanickou a elektrickou charakterizaci struktury. Podle návrhu byly vyrobeny jednoduché pasivní elementy na SIMOX SOI s naprášenou AlCuSi metalizací a provedena jejich charakterizace.
Links
| MSM0021622410, plan (intention) |
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