Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications

Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications. Edited by Krishna Seshan. 2nd ed. Norwich, N.Y.: Noyes Publications, 2002. xxviii, 62. ISBN 0815514425.

Základní údaje

• Originální název: Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications
• Autoři: Edited by Krishna Seshan.
• Vydání: 2nd ed. Norwich, N.Y. xxviii, 62, 2002.
• Nakladatel: Noyes Publications

Další údaje

• ISBN: 0815514425