Handbook of thin-film deposition processes and techniques :
principles, methods, equipment, and applications

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Publikace Přehled o publikaci

Přehled o publikaci

2002

Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications

Základní údaje

Originální název

Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications

Autoři

Edited by Krishna Seshan.

Vydání

2nd ed. Norwich, N.Y. xxviii, 62, 2002

Nakladatel

Noyes Publications

Další údaje

ISBN

0815514425

Změněno: 8. 8. 2022 14:00, Záznam byl importován z knihovního systému.

Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications. Edited by Krishna Seshan. 2nd ed. Norwich, N.Y.: Noyes Publications, 2002, xxviii, 62. ISBN 0815514425.

@article{,
   address = {Norwich, N.Y.},
   edition = {2nd ed.},
   location = {Norwich, N.Y.},
   isbn = {0815514425},
   publisher = {Noyes Publications},
   title = {Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications},
   year = {2002}
}

TY  - JOUR
PY  - 2002
TI  - Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications
PB  - Noyes Publications
CY  - Norwich, N.Y.
SN  - 0815514425
ER  -

\textit{Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications}. Edited by Krishna Seshan. 2nd ed. Norwich, N.Y.: Noyes Publications, 2002, xxviii, 62. ISBN~0815514425.