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@article{884977,
author = {Zajíčková, Lenka and Jašek, Ondřej and Eliáš, Marek and Synek, Petr and Lazar, Lukáš and Schneeweiss, Oldřich and Hanzlíková, Renáta},
article_number = {6},
keywords = {catalyst; microwave torch; plasma-enhanced chemical vapor deposition; scanning electron microscopy},
language = {eng},
issn = {0033-4545},
journal = {Pure and Applied Chemistry},
title = {Synthesis of carbon nanotubes by plasma-enhanced chemical vapor deposition in an atmospheric-pressure microwave torch},
url = {http://iupac.org/publications/pac/82/6/1259/},
volume = {82/2010},
year = {2010}
}
TY - JOUR
ID - 884977
AU - Zajíčková, Lenka - Jašek, Ondřej - Eliáš, Marek - Synek, Petr - Lazar, Lukáš - Schneeweiss, Oldřich - Hanzlíková, Renáta
PY - 2010
TI - Synthesis of carbon nanotubes by plasma-enhanced chemical vapor deposition in an atmospheric-pressure microwave torch
JF - Pure and Applied Chemistry
VL - 82/2010
IS - 6
SP - 1259-1272
EP - 1259-1272
SN - 00334545
KW - catalyst
KW - microwave torch
KW - plasma-enhanced chemical vapor deposition
KW - scanning electron microscopy
UR - http://iupac.org/publications/pac/82/6/1259/
N2 - There are many different techniques for the synthesis of carbon nanotubes (CNTs), and plasma technologies experience a significant competitor in thermal chemical vapor deposition (CVD) processes. A particular process is, therefore, selected according to the specific requirements of an application, which clearly differ for the development of composites as compared to nanoelectronics, field emission, displays, sensors, and the like. This paper discusses the method for the synthesis of CNTs using an atmospheric-pressure microwave (MW) torch. It was successfully applied in the fast deposition of multiwalled nanotubes (MWNTs) on a substrate without the necessity of any vacuum or heating equipment. Dense straight-standing nanotubes were prepared on Si substrates with and also without barrier SiOx layer. Therefore, it was possible to produce CNTs directly on conductive Si and to use them as an electron-emitting electrode of the gas pressure sensor. The CNTs grown in MW torch were also used to create a gas sensor based on the changes of electrical resistance measured between two planar electrodes connected by the CNTs.
ER -
ZAJÍČKOVÁ, Lenka, Ondřej JAŠEK, Marek ELIÁŠ, Petr SYNEK, Lukáš LAZAR, Oldřich SCHNEEWEISS a Renáta HANZLÍKOVÁ. Synthesis of carbon nanotubes by plasma-enhanced chemical vapor deposition in an atmospheric-pressure microwave torch. \textit{Pure and Applied Chemistry}. 2010, roč.~82/2010, č.~6, s.~1259-1272, 13 s. ISSN~0033-4545.
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