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@inproceedings{894944, author = {Skácelová, Dana and Haničinec, Martin and Sťahel, Pavel and Černák, Mirko}, address = {Plzeň}, booktitle = {Potential and Applications of Thin Ceramic and Metal Coatings}, keywords = {silicon surface - dielectric barrier discharge - plasma treatment}, language = {eng}, location = {Plzeň}, isbn = {978-80-7043-894-7}, pages = {77-78}, publisher = {University of West Bohemia}, title = {Plasma treatment of silicon surface}, year = {2010} }
TY - JOUR ID - 894944 AU - Skácelová, Dana - Haničinec, Martin - Sťahel, Pavel - Černák, Mirko PY - 2010 TI - Plasma treatment of silicon surface PB - University of West Bohemia CY - Plzeň SN - 9788070438947 KW - silicon surface - dielectric barrier discharge - plasma treatment N2 - The contribution focuses on the plasma treatment of crystalline silicon surface. The plasma was generated by Diffuse Coplanar Surface Barrier Discharge (DCSBD) at atmospheric pressure in an ambient air. By means of the contact angle measurements surface free energy was studied an by atomic force microscope (AFM) the surface roughness of silicon before and after plasma treatment was investigated. ER -
SKÁCELOVÁ, Dana, Martin HANIČINEC, Pavel SŤAHEL a Mirko ČERNÁK. Plasma treatment of silicon surface. In \textit{Potential and Applications of Thin Ceramic and Metal Coatings}. Plzeň: University of West Bohemia, 2010, s.~77-78. ISBN~978-80-7043-894-7.
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