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@inproceedings{902092,
author = {Dvořák, Pavel and Vašina, Petr and Buršíková, Vilma and Žemlička, Radek},
address = {Paříž},
booktitle = {Bulletin of the American Physical Society 55 (2010), CTP142},
keywords = {higher harmonic frequencies; plasma},
language = {eng},
location = {Paříž},
pages = {40-44},
publisher = {CNRS},
title = {Higher harmonic frequencies in capacitive discharges},
year = {2010}
}
TY - JOUR
ID - 902092
AU - Dvořák, Pavel - Vašina, Petr - Buršíková, Vilma - Žemlička, Radek
PY - 2010
TI - Higher harmonic frequencies in capacitive discharges
PB - CNRS
CY - Paříž
KW - higher harmonic frequencies
KW - plasma
N2 - The contribution deals with higher harmonic frequencies that are produced in capacitively coupled discharges due to the nonlinearity of sheaths. Higher harmonics are strong especially at low pressure and they can have a significant influence on plasma. Moreover, they are a tool for plasma diagnostics and monitoring. In this work, dependence of amplitudes of higher harmonics on plasma parameters is studied experimentally. Decrease of pressure causes resonant amplification of harmonics probably related to the series plasma-sheath resonance. Similarly, decrease of electron concentration lead to a resonant amplification. Further, effects of RF power and state of the matching unit were compared. Finally, it was shown that harmonics sensitively react on presence of a deposited film which makes them suitable for monitoring purposes.
ER -
DVOŘÁK, Pavel, Petr VAŠINA, Vilma BURŠÍKOVÁ a Radek ŽEMLIČKA. Higher harmonic frequencies in capacitive discharges. In \textit{Bulletin of the American Physical Society 55 (2010), CTP142}. Paříž: CNRS, 2010, s.~40-44. ISSN~0003-0503.
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