| NAVRÁTIL, Zdeněk, Pavel DVOŘÁK, Oto BRZOBOHATÝ a David TRUNEC. Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model. Journal of Physics D: Applied Physics. Bristol, England: IOP Publishing Ltd., 2010, roč. 43, č. 50, s. 505203-505213. ISSN 0022-3727. |
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@article{910333,
author = {Navrátil, Zdeněk and Dvořák, Pavel and Brzobohatý, Oto and Trunec, David},
article_location = {Bristol, England},
article_number = {50},
keywords = {High-frequency and RF discharges; Particle-in-cell method; Transport properties; Monte Carlo methods; Optical measurements},
language = {eng},
issn = {0022-3727},
journal = {Journal of Physics D: Applied Physics},
title = {Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model},
url = {http://dx.doi.org/10.1088/0022-3727/43/50/505203},
volume = {43},
year = {2010}
}
TY - JOUR
ID - 910333
AU - Navrátil, Zdeněk - Dvořák, Pavel - Brzobohatý, Oto - Trunec, David
PY - 2010
TI - Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model
JF - Journal of Physics D: Applied Physics
VL - 43
IS - 50
SP - 505203
EP - 505203
PB - IOP Publishing Ltd.
SN - 00223727
KW - High-frequency and RF discharges
KW - Particle-in-cell method
KW - Transport properties
KW - Monte Carlo methods
KW - Optical measurements
UR - http://dx.doi.org/10.1088/0022-3727/43/50/505203
N2 - A method of determination of electron temperature and electron density in plasmas based on optical emission spectroscopy complemented with collisional-radiative modelling (OES/CRM) was studied in this work. A radiofrequency (13.56 MHz) capacitively coupled discharge in neon at 10 Pa was investigated by intensity calibrated optical emission spectroscopy. The absolute intensities of neon transitions between 3p and 3s states were fitted with a collisional-radiative (CR) model in order to determine the electron temperature and electron density. Measuring techniques such as imaging with an ICCD camera were adopted for supplementary diagnostics. The obtained results were compared with the results of compensated Langmuir probe measurement and one-dimensional particle-in-cell/Monte Carlo (PIC/MC) simulation. The results of OES/CRM and PIC/MC method were in close agreement in the case of electron temperature in the vicinity of a driven electrode. The determined value of electron temperature was about 8 eV. In bulk plasma, the measured spectra were not satisfactorily fitted. In the case of electron density only relative agreement was obtained between OES/CRM and Langmuir probe measurement; the absolute values differed by a factor of 5. The axial dependence of electron density calculated by PIC/MC was distinct from them, reaching the maximum values between the results of the other two methods. The investigation of power dependence of plasma parameters close to the driven electrode showed a decrease in electron temperature and an increase in electron density together with increasing incoming RF power. The calculated spectra fitted very well the measured spectra in this discharge region.
ER -
NAVRÁTIL, Zdeněk, Pavel DVOŘÁK, Oto BRZOBOHATÝ a David TRUNEC. Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model. \textit{Journal of Physics D: Applied Physics}. Bristol, England: IOP Publishing Ltd., 2010, roč.~43, č.~50, s.~505203-505213. ISSN~0022-3727.
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