| NAVRÁTIL, Zdeněk, Pavel DVOŘÁK, Oto BRZOBOHATÝ a David TRUNEC. Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling. In Bulletin of the American Physical Society, Vol. 55, No. 7. 2010. ISSN 0003-0503. |
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@proceedings{914637,
author = {Navrátil, Zdeněk and Dvořák, Pavel and Brzobohatý, Oto and Trunec, David},
booktitle = {Bulletin of the American Physical Society, Vol. 55, No. 7},
keywords = {optical emission spectroscopy; collisional-radiative model; RF discharge; neon},
language = {eng},
title = {Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling},
year = {2010}
}
TY - CONF
ID - 914637
AU - Navrátil, Zdeněk - Dvořák, Pavel - Brzobohatý, Oto - Trunec, David
PY - 2010
TI - Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling
KW - optical emission spectroscopy
KW - collisional-radiative model
KW - RF discharge
KW - neon
N2 - A novel method of determination of electron temperature and electron density in plasma based on optical emission spectroscopy and collisional-radiative modelling was compared with Langmuir probe measurement and PIC/MC simulation. An RF(13.56 MHz) capacitively-coupled discharge in neon at 10 Pa was investigated by intensity-calibrated optical emission spectroscopy. The intensities of neon transitions between 3s-3p states were fitted with CR model to determine the electron temperature and density. Metastable density measured in absorption was used in the calculations. A good agreement between electron temperature measured by OES+CR method and PIC/MC simulation was obtained close to driven electrode. The decrease of the electron temperature going into the bulk plasma, as expected from PIC/MC simulation, was not observed in experiment. Electron density determined from the fit of absolute intensities was found to be 5$\times$ larger than the result of Langmuir probe measurement. The axial dependencies of electron density determined by OES+CR and Langmuir probe were very similar.
ER -
NAVRÁTIL, Zdeněk, Pavel DVOŘÁK, Oto BRZOBOHATÝ a David TRUNEC. Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling. In \textit{Bulletin of the American Physical Society, Vol. 55, No. 7}. 2010. ISSN~0003-0503.
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