2010
PREPARATION AND CHARACTERIZATION OF DLC:N FILMS
MURESAN, Mihai George; Lenka ZAJÍČKOVÁ; Vilma BURŠÍKOVÁ; Daniel FRANTA; David NEČAS et. al.Základní údaje
Originální název
PREPARATION AND CHARACTERIZATION OF DLC:N FILMS
Autoři
Vydání
1st. Olomouc, 2nd International Conference Nanocon 2010, od s. 434-440, 7 s. 2010
Nakladatel
TANGER Ltd.
Další údaje
Jazyk
angličtina
Typ výsledku
Stať ve sborníku
Obor
10305 Fluids and plasma physics
Stát vydavatele
Česká republika
Utajení
není předmětem státního či obchodního tajemství
Kód RIV
RIV/00216224:14310/10:00049718
Organizační jednotka
Přírodovědecká fakulta
ISBN
978-80-87294-19-2
UT WoS
000286656400077
Klíčová slova anglicky
Diamond-Like Carbon; PECVD
Změněno: 20. 4. 2012 10:09, Ing. Andrea Mikešková
Anotace
V originále
Diamond-like carbon (DLC) exhibits useful properties such as wide band gaps, high thermal conductivities, high hardness and low friction coefficient. Technical difficulties due to inherent internal stress in preparation of DLC films on metallic substrates are the cause of it's poor adhesion. Nitrogen doped diamond-like carbon (DLC:N) films were deposited by plasma enhanced chemical vapuor deposition (PECVD) using capacitively coupled rf discharge at 13.56 MHz in the mixture of methane, hydrogen and nitrogen on silicon, glass and metallic substrates (stainless steel). Gas mixture, bias and discharge frequency were changed to modify the parameters of the deposited films. The optical properties of the deposited films were investigated by: reflectometry, ellipsometry and FTIR transmittance measurement. Depth sensing indentation technique was used to determine hardness and elastic modulus. To improve adhesion on metallic substrates and create a hard film, they were optimised in order to improve adhesion, by the preparation of multilayer-structures with different deposition conditions.
Návaznosti
| GA202/07/1669, projekt VaV |
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| GD104/09/H080, projekt VaV |
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| MSM0021622411, záměr |
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