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@proceedings{930229,
author = {Muresan, Mihai George and Zajíčková, Lenka and Franta, Daniel and Nečas, David},
booktitle = {19th Annual Student Conference - Week of Doctoral Students 2010},
keywords = {Diamond-Like Carbon; optical properties},
language = {eng},
title = {Effect of Nitrogen Incorporation on Optical Properties of DLC Layers},
url = {http://www.mff.cuni.cz/veda/konference/wds/},
year = {2010}
}
TY - CONF
ID - 930229
AU - Muresan, Mihai George - Zajíčková, Lenka - Franta, Daniel - Nečas, David
PY - 2010
TI - Effect of Nitrogen Incorporation on Optical Properties of DLC Layers
KW - Diamond-Like Carbon
KW - optical properties
UR - http://www.mff.cuni.cz/veda/konference/wds/
N2 - Diamond-like carbon (amorphous hydrogenated carbon: a-C:H) films doped with different amount of nitrogen were deposited by plasma enhanced chemical vapor deposition (PECVD) using capacitively coupled rf discharge 13.56 in the mixture of CH4/H2/N2 on silicon substrates. Nitrogen content allowed reduction of the inherent internal stress of the DLC layer. DC self-bias, time and gas feed composition parameters were used for modification of the optical properties, adhesion to substrates, chemical composition and structure of the deposited films.
ER -
MURESAN, Mihai George, Lenka ZAJÍČKOVÁ, Daniel FRANTA a David NEČAS. Effect of Nitrogen Incorporation on Optical Properties of DLC Layers. In \textit{19th Annual Student Conference - Week of Doctoral Students 2010}. 2010.
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