2010
Effect of nitrogen incorporation on mechanical properties of DLC coatings on metallic substrates
MURESAN, Mihai George; Lenka ZAJÍČKOVÁ; Vilma BURŠÍKOVÁ; Daniel FRANTA; David NEČAS et al.Základní údaje
Originální název
Effect of nitrogen incorporation on mechanical properties of DLC coatings on metallic substrates
Autoři
MURESAN, Mihai George; Lenka ZAJÍČKOVÁ; Vilma BURŠÍKOVÁ; Daniel FRANTA; David NEČAS a Vratislav PEŘINA
Vydání
Material Science and Engineering, 2010
Další údaje
Jazyk
angličtina
Typ výsledku
Konferenční abstrakt
Obor
10305 Fluids and plasma physics
Stát vydavatele
Německo
Utajení
není předmětem státního či obchodního tajemství
Odkazy
Označené pro přenos do RIV
Ano
Kód RIV
RIV/00216224:14310/10:00047540
Organizační jednotka
Přírodovědecká fakulta
Klíčová slova anglicky
DLC; metallic substrate; adhesion
Změněno: 14. 3. 2011 19:23, Mihai George Muresan, Ph.D., M.Sc.
Anotace
V originále
Diamond-like carbon (DLC) and hydrogenated amorphous carbon (a-C:H) films has grown enormously due to their particular and useful properties such as their wide band gaps, high thermal conductivities, high hardness and low friction coefficient. However, there are some technical difficulties in their preparation especially on metallic substrates, where the adhesion is poor. Diamond-like carbon (amorphous hydrogenated carbon: a-C:H) films doped with different amount of nitrogen were deposited by plasma enhanced chemical vapor deposition (PECVD) using capacitively coupled rf discharge (13.56 or 27.12 MHz) in the mixture of CH4/H2/N2 on silicon, glass and metallic substrates. The pressure was maintained below 20 Pa. DC self-bias and gas feed composition parameters were used for modification of the mechanical properties, adhesion to different substrates, chemical composition and structure of the deposited films. Nitrogen content allowed deposition of hard films also on metallic substrates such as stainless steel and aluminum, which are known for poor adhesion on pure DLC films. Mechanical properties of the deposited films were investigated by depth sensing indentation technique. Their structure was studied by optical methods in spectral range from UV to IR. Chemical composition was determined by Rutherford Backscattering Spectroscopy (RBS) combined with Elastic Recoil Detection Analysis (ERDA). From these we could evaluate the percentage of hydrogen from the deposited films. Adhesion to these substrates and mechanical properties of the coatings was optimized by the preparation of multilayer-structures involving TiN and different a-C:H:N films. Acknowledgement: This research has been supported by Ministry of Education, under project MSM 0021622411, Grant agency GACR No. 104/09/H080 and GACR No. 202/07/1669.
Návaznosti
| GA202/07/1669, projekt VaV |
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| GD104/09/H080, projekt VaV |
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| MSM0021622411, záměr |
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