NEČAS, David, Daniel FRANTA, Vilma BURŠÍKOVÁ a Ivan OHLÍDAL. Ellipsometric characterisation of thin films non-uniform in thickness. Thin Solid Films. Elsevier, 2011, roč. 519, č. 9, s. 2715-2717. ISSN 0040-6090. Dostupné z: https://dx.doi.org/10.1016/j.tsf.2010.12.065. |
Další formáty:
BibTeX
LaTeX
RIS
@article{940454, author = {Nečas, David and Franta, Daniel and Buršíková, Vilma and Ohlídal, Ivan}, article_number = {9}, doi = {http://dx.doi.org/10.1016/j.tsf.2010.12.065}, keywords = {Optical characterisation; Variable angle spectroscopic ellipsometry; Phase-modulated ellipsometry; Non-uniform thin films}, language = {eng}, issn = {0040-6090}, journal = {Thin Solid Films}, title = {Ellipsometric characterisation of thin films non-uniform in thickness}, url = {http://dx.doi.org/10.1016/j.tsf.2010.12.065}, volume = {519}, year = {2011} }
TY - JOUR ID - 940454 AU - Nečas, David - Franta, Daniel - Buršíková, Vilma - Ohlídal, Ivan PY - 2011 TI - Ellipsometric characterisation of thin films non-uniform in thickness JF - Thin Solid Films VL - 519 IS - 9 SP - 2715-2717 EP - 2715-2717 PB - Elsevier SN - 00406090 KW - Optical characterisation KW - Variable angle spectroscopic ellipsometry KW - Phase-modulated ellipsometry KW - Non-uniform thin films UR - http://dx.doi.org/10.1016/j.tsf.2010.12.065 N2 - Ellipsometric formulae for thin films non-uniform in thickness are presented. A general type of thickness nonuniformity is considered and the influence of the varying angle of incidence is taken into account. The presented formulae are applied to the optical characterisation of polymer SiO2-like thin films exhibiting a relatively strong thickness non-uniformity. It is shown that the complete optical characterisation of these polymer thin films can be performed. Thus, the spectral dependences of the optical constants, mean thickness and parameters related to the shape of thickness non-uniformity can be determined. ER -
NEČAS, David, Daniel FRANTA, Vilma BURŠÍKOVÁ a Ivan OHLÍDAL. Ellipsometric characterisation of thin films non-uniform in thickness. \textit{Thin Solid Films}. Elsevier, 2011, roč.~519, č.~9, s.~2715-2717. ISSN~0040-6090. Dostupné z: https://dx.doi.org/10.1016/j.tsf.2010.12.065.
|