| VAŠINA, Petr, Pavel SOUČEK, Tereza SCHMIDTOVÁ, Marek ELIÁŠ, Vilma BURŠÍKOVÁ, Mojmír JÍLEK, Mojmír Jr. JÍLEK, Jan SCHÄFER a Jiří BURŠÍK. Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering. Surface & Coatings Technology. Elsevier Science, 2011, roč. 205, July, s. 53-56. ISSN 0257-8972. |
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@article{944455,
author = {Vašina, Petr and Souček, Pavel and Schmidtová, Tereza and Eliáš, Marek and Buršíková, Vilma and Jílek, Mojmír and Jílek, Mojmír Jr. and Schäfer, Jan and Buršík, Jiří},
article_number = {July},
keywords = {Composite; Mechanical properties; Magnetron; Carbon; Titanium},
language = {eng},
issn = {0257-8972},
journal = {Surface & Coatings Technology},
title = {Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering},
volume = {205},
year = {2011}
}
TY - JOUR
ID - 944455
AU - Vašina, Petr - Souček, Pavel - Schmidtová, Tereza - Eliáš, Marek - Buršíková, Vilma - Jílek, Mojmír - Jílek, Mojmír Jr. - Schäfer, Jan - Buršík, Jiří
PY - 2011
TI - Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering
JF - Surface & Coatings Technology
VL - 205
IS - July
SP - 53-56
EP - 53-56
PB - Elsevier Science
SN - 02578972
KW - Composite
KW - Mechanical properties
KW - Magnetron
KW - Carbon
KW - Titanium
N2 - Nanocrystalline titanium carbide embedded in an hydrogenated amorphous carbon matrix (nc-TiC/a-C:H) shows high hardness and Young's modulus together with low wear and low friction coefficient. In this paper, we report on the preparation of well adherent nc-TiC/a-C:H coatings ~5 um thick on stainless steel substrates using a well balanced magnetic field configuration and only very low power RF bias on the substrate. Hardness and Young's modulus of these coatings are 43 GPa and 380 GPa, respectively. The mechanical properties – hardness and Young's modulus – measured from the coating's top reach the values obtained at optimized experiments where the unbalanced magnetic field configuration was used. A simple method of depth profiling suitable for evaluation of mechanical properties of several micrometers thick coatings is developed and employed. The paper reports on the depth profile analyses of the coating hardness, Young's modulus, composition and morphology.
ER -
VAŠINA, Petr, Pavel SOUČEK, Tereza SCHMIDTOVÁ, Marek ELIÁŠ, Vilma BURŠÍKOVÁ, Mojmír JÍLEK, Mojmír Jr. JÍLEK, Jan SCHÄFER a Jiří BURŠÍK. Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering. \textit{Surface \&{} Coatings Technology}. Elsevier Science, 2011, roč.~205, July, s.~53-56. ISSN~0257-8972.
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