Další formáty:
BibTeX
LaTeX
RIS
@proceedings{950212,
author = {Schmidtová, Tereza and Souček, Pavel and Vašina, Petr},
booktitle = {30th ICPIG Conference Proceedings},
keywords = {hybrid PVD-PECVD process; magnetron sputtering; hysteresis; OES},
language = {eng},
title = {Experimental study of hybrid PVD-PECVD process of metallic target sputtering in argon and acetylene},
url = {http://www.qub.ac.uk/sites/icpig2011/abstractlist/},
year = {2011}
}
TY - CONF
ID - 950212
AU - Schmidtová, Tereza - Souček, Pavel - Vašina, Petr
PY - 2011
TI - Experimental study of hybrid PVD-PECVD process of metallic target sputtering in argon and acetylene
KW - hybrid PVD-PECVD process
KW - magnetron sputtering
KW - hysteresis
KW - OES
UR - http://www.qub.ac.uk/sites/icpig2011/abstractlist/
N2 - Hybrid PVD-PECVD process of titanium sputtering in argon and acetylene atmosphere combines aspects of both conventional techniques: sputtering of titanium target (PVD) and acetylene as a source of carbon fragments polymerization (PECVD). It has been used for deposition of nanocomposite material consisting of nanocrystallites of titanium carbide embedded in hydrogenated carbon matrix with good mechanical properties. The aim of this contribution is to describe and understand basic processes influencing the deposition process of such films by comparing the behaviour of basic discharge parameters on acetylene supply flow. Hybrid sputtering driven by DC power alone and together with RF substrate bias is studied.
ER -
SCHMIDTOVÁ, Tereza, Pavel SOUČEK a Petr VAŠINA. Experimental study of hybrid PVD-PECVD process of metallic target sputtering in argon and acetylene. In \textit{30th ICPIG Conference Proceedings}. 2011.
|
