2011
Multilayered films based on DLC, DLC:N and SiOx grown by PECVD on stainless steel
MURESAN, Mihai George; Lenka ZAJÍČKOVÁ; Vilma BURŠÍKOVÁ; Daniel FRANTA; David NEČAS et al.Základní údaje
Originální název
Multilayered films based on DLC, DLC:N and SiOx grown by PECVD on stainless steel
Autoři
MURESAN, Mihai George; Lenka ZAJÍČKOVÁ; Vilma BURŠÍKOVÁ; Daniel FRANTA; David NEČAS a Vratislav PEŘINA
Vydání
E-MRS 2011 Spring Meeting, 2011
Další údaje
Jazyk
angličtina
Typ výsledku
Konferenční abstrakt
Obor
10305 Fluids and plasma physics
Stát vydavatele
Francie
Utajení
není předmětem státního či obchodního tajemství
Označené pro přenos do RIV
Ano
Kód RIV
RIV/00216224:14310/11:00050060
Organizační jednotka
Přírodovědecká fakulta
Klíčová slova anglicky
Diamond-like carbon DLC; Adhesion; Silicon oxide; Nitrogen doping; Stainless steel
Změněno: 13. 12. 2011 16:09, Mihai George Muresan, Ph.D., M.Sc.
Anotace
V originále
Diamond-like carbon films (DLC) exhibit useful properties such as high hardness, low friction coefficient, high thermal conductivity and wide band gaps. However, due to an inherent internal stress and bad adhesion to stainless steel their use in industrial applications is limited. A better adhesion can be achieved by adding different dopants into a DLC matrix, especially for metallic substrates. Also, silicon based interlayers was used In order to promote the adhesion. Hydrogenated DLC films using different mixtures were prepared by plasma enhanced chemical vapor deposition (PECVD) using capacitively coupled rf discharge at 13.56 MHz. Optical and mechanical methods were used to to determine functional properties. The hardness and Young's modulus of multilayered films were between 14 GPa and 80 GPa, respectively. For adhesion, the critical load Lc2 ranged from 2.1 N in the case of nitrogen containing DLC, to 11.8 N for multilayered film based on SiOx.
Návaznosti
| GD104/09/H080, projekt VaV |
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| MSM0021622411, záměr |
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