INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF
HYDROGEN OR NITROGEN INTO DLC

a 2011

INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC

MURESAN, Mihai George; Lenka ZAJÍČKOVÁ; Vilma BURŠÍKOVÁ; Daniel FRANTA; David NEČAS et al.

Základní údaje

Originální název

INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC

Autoři

MURESAN, Mihai George; Lenka ZAJÍČKOVÁ; Vilma BURŠÍKOVÁ; Daniel FRANTA; David NEČAS; Vratislav PEŘINA a Romana MIKŠOVÁ

Vydání

12th International Balkan Workshop on Applied Physics, 2011, 2011

Další údaje

Jazyk

angličtina

Typ výsledku

Konferenční abstrakt

Obor

10305 Fluids and plasma physics

Stát vydavatele

Rumunsko

Utajení

není předmětem státního či obchodního tajemství

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/11:00050061

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

Diamond-like carbon; Amorphous hydrogenated carbon; Optical properties; Nitrogen

Změněno: 5. 12. 2011 13:56, Mihai George Muresan, Ph.D., M.Sc.

Anotace

V originále

Interesting properties of diamond-like carbon (DLC) coatings such as high hardness, low friction coefficient, high thermal conductivity and wide band gaps have increased the number of industrial partners to research ways of producing DLC layers with chemical inertness, high gas barrier properties and high biocompatibility. The aim of the experiments was to characterize and compare the properties of diamond-like carbon films prepared from different mixtures such as CH4/H2, CH4/H2/N2 and CH4/Ar from a radiofrequency capacitively-coupled discharge at 13.56 MHz. Parameters like concentration, pressure, power and time were changed to vary film properties. The films were optically characterized by UV-VIS reflectometry, ellipsometry. Layer composition was investigated by FTIR transmittance and Rutherford backscattering spectrometry (RBS) in combination with elastic recoil detection analysis (ERDA). The mechanical properties were assessed by depth-sensing indentation (DSI).

Návaznosti

GD104/09/H080, projekt VaV

Název: Plazmochemické procesy a jejich technologické aplikace

Investor: Grantová agentura ČR, Plazmochemické procesy a jejich technologické aplikace

MSM0021622411, záměr

Název: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Citovat

MURESAN, Mihai George; Lenka ZAJÍČKOVÁ; Vilma BURŠÍKOVÁ; Daniel FRANTA; David NEČAS; Vratislav PEŘINA a Romana MIKŠOVÁ. INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC. In 12th International Balkan Workshop on Applied Physics, 2011. 2011.

@proceedings{953441,
   author = {Muresan, Mihai George and Zajíčková, Lenka and Buršíková, Vilma and Franta, Daniel and Nečas, David and Peřina, Vratislav and Mikšová, Romana},
   booktitle = {12th International Balkan Workshop on Applied Physics, 2011},
   keywords = {Diamond-like carbon; Amorphous hydrogenated carbon; Optical properties; Nitrogen},
   language = {eng},
   title = {INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC},
   year = {2011}
}

TY  - CONF
ID  - 953441
AU  - Muresan, Mihai George - Zajíčková, Lenka - Buršíková, Vilma - Franta, Daniel - Nečas, David - Peřina, Vratislav - Mikšová, Romana
PY  - 2011
TI  - INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC
KW  - Diamond-like carbon
KW  - Amorphous hydrogenated carbon
KW  - Optical properties
KW  - Nitrogen
N2  - Interesting properties of diamond-like carbon (DLC) coatings such as high hardness, low friction coefficient, high thermal conductivity and wide band gaps have increased the number of industrial partners to research ways of producing DLC layers with chemical inertness, high gas barrier properties and high biocompatibility. The aim of the experiments was to characterize and compare the properties of diamond-like carbon films prepared from different mixtures such as CH4/H2, CH4/H2/N2 and CH4/Ar from a radiofrequency capacitively-coupled discharge at 13.56 MHz. Parameters like concentration, pressure, power and time were changed to vary film properties. The films were optically characterized by UV-VIS reflectometry, ellipsometry. Layer composition was investigated by FTIR transmittance and Rutherford backscattering spectrometry (RBS) in combination with elastic recoil detection analysis (ERDA). The mechanical properties were assessed by depth-sensing indentation (DSI).
ER  -

MURESAN, Mihai George; Lenka ZAJÍČKOVÁ; Vilma BURŠÍKOVÁ; Daniel FRANTA; David NEČAS; Vratislav PEŘINA a Romana MIKŠOVÁ. INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC. In \textit{12th International Balkan Workshop on Applied Physics, 2011}. 2011.

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