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@proceedings{954057,
author = {Šperka, Jiří and Zajíčková, Lenka and Jašek, Ondřej and Dvořák, Pavel and Mikmeková, Šárka and Schäfer, Jan},
booktitle = {Potential and Applications of Surface Nanotreatment of Polymers and Glass},
keywords = {ultrananocrystalline diamond;low energy scanning electron microscopy},
language = {eng},
title = {Characterization of ultrananocrystalline diamond thin films using low energy scanning electron microscopy},
year = {2011}
}
TY - CONF
ID - 954057
AU - Šperka, Jiří - Zajíčková, Lenka - Jašek, Ondřej - Dvořák, Pavel - Mikmeková, Šárka - Schäfer, Jan
PY - 2011
TI - Characterization of ultrananocrystalline diamond thin films using low energy scanning electron microscopy
KW - ultrananocrystalline diamond;low energy scanning electron microscopy
N2 - This paper deals with the low energy scanning electron microscopy characterization of ultrananocrystalline diamond films. These films were prepared by plasma enhanced chemical vapor deposition (PECVD) using dual frequency discharge.
ER -
ŠPERKA, Jiří, Lenka ZAJÍČKOVÁ, Ondřej JAŠEK, Pavel DVOŘÁK, Šárka MIKMEKOVÁ a Jan SCHÄFER. Characterization of ultrananocrystalline diamond thin films using low energy scanning electron microscopy. In \textit{Potential and Applications of Surface Nanotreatment of Polymers and Glass}. 2011.
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