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@proceedings{955355,
author = {Schmidtová, Tereza and Souček, Pavel and Vašina, Petr},
booktitle = {Potential and Applications of Surface Nanotreatment of Polymers and Glass},
keywords = {magnetron sputtering; hybrid PVD-PECVD; deposition process},
language = {eng},
title = {Understanding of hybrid PVD-PECVD deposition process – titanium magnetron sputtering in argon and acetylene},
year = {2011}
}
TY - CONF
ID - 955355
AU - Schmidtová, Tereza - Souček, Pavel - Vašina, Petr
PY - 2011
TI - Understanding of hybrid PVD-PECVD deposition process – titanium magnetron sputtering in argon and acetylene
KW - magnetron sputtering
KW - hybrid PVD-PECVD
KW - deposition process
N2 - Hybrid PVD-PECVD process of titanium magnetron sputtering in argon and acetylene atmosphere combines aspects of both conventional techniques: sputtering of titanium target (PVD) and acetylene as a source of carbon for polymerization (PECVD). It has been used for deposition of nanocomposite material consisting of nanocrystallites of titanium carbide embedded in hydrogenated carbon matrix (nc-TiC/a-C:H) which is an industrially attractive material for protective coatings. The aim of this contribution is to describe and understand elementary processes influencing the deposition process. Evolution of discharge voltage and current, pressure and selected spectral line intensities as a function of acetylene supply flow is reported.
ER -
SCHMIDTOVÁ, Tereza, Pavel SOUČEK a Petr VAŠINA. Understanding of hybrid PVD-PECVD deposition process – titanium magnetron sputtering in argon and acetylene. Online. In \textit{Potential and Applications of Surface Nanotreatment of Polymers and Glass}. 2011, [citováno 2024-04-24]
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