On the implementation of computed laminography using
synchrotron radiation

J 2011

On the implementation of computed laminography using synchrotron radiation

HELFEN, L., A. MYAGOTIN, Petr MIKULÍK, P. PERNOT, A. VOROPAEV et. al.

Základní údaje

Originální název

On the implementation of computed laminography using synchrotron radiation

Autoři

HELFEN, L. (276 Německo), A. MYAGOTIN (643 Rusko), Petr MIKULÍK (203 Česká republika, garant, domácí), P. PERNOT (203 Česká republika), A. VOROPAEV (643 Rusko), M. ELYYAN (276 Německo), M. DI MICHIEL (380 Itálie), J. BARUCHEL (250 Francie) a T. BAUMBACH (276 Německo)

Vydání

Review of Scientific Instruments, Melville (USA), American Institute of Physics, 2011, 0034-6748

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10302 Condensed matter physics

Stát vydavatele

Spojené státy

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 1.367

Kód RIV

RIV/00216224:14310/11:00054740

Organizační jednotka

Přírodovědecká fakulta

UT WoS

000292334000031

Klíčová slova anglicky

x-ray imaging; laminography; synchrotron radiation; radiography; CT

Štítky

AKR, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 4. 4. 2012 16:16, Ing. Andrea Mikešková

Anotace

V originále

Hard x rays from a synchrotron source are used in this implementation of computed laminography for three-dimensional (3D) imaging of flat, laterally extended objects. Due to outstanding properties of synchrotron light, high spatial resolution down to the micrometer scale can be attained, even for specimens having lateral dimensions of several decimeters. Operating either with a monochromatic or with a white synchrotron beam, the method can be optimized to attain high sensitivity or considerable inspection throughput in synchrotron user and small-batch industrial experiments. The article describes the details of experimental setups, alignment procedures, and the underlying reconstruction principles. Imaging of interconnections in flip-chip and wire-bonded devices illustrates the peculiarities of the method compared to its alternatives and demonstrates the wide application potential for the 3D inspection and quality assessment in microsystem technology.

Návaznosti

MSM0021622410, záměr

Název: Fyzikální a chemické vlastnosti pokročilých materiálů a struktur

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Fyzikální a chemické vlastnosti pokročilých materiálů a struktur

Citovat

HELFEN, L., A. MYAGOTIN, Petr MIKULÍK, P. PERNOT, A. VOROPAEV, M. ELYYAN, M. DI MICHIEL, J. BARUCHEL a T. BAUMBACH. On the implementation of computed laminography using synchrotron radiation. Review of Scientific Instruments. Melville (USA): American Institute of Physics, 2011, roč. 82, č. 1, s. "nestrankovano", 8 s. ISSN 0034-6748.

@article{964883,
   author = {Helfen, L. and Myagotin, A. and Mikulík, Petr and Pernot, P. and Voropaev, A. and Elyyan, M. and Di Michiel, M. and Baruchel, J. and Baumbach, T.},
   article_location = {Melville (USA)},
   article_number = {1},
   keywords = {x-ray imaging; laminography; synchrotron radiation; radiography; CT},
   language = {eng},
   issn = {0034-6748},
   journal = {Review of Scientific Instruments},
   title = {On the implementation of computed laminography using synchrotron radiation},
   url = {http://rsi.aip.org/resource/1/rsinak/v82/i6/p063702_s1?isAuthorized=no},
   volume = {82},
   year = {2011}
}

TY  - JOUR
ID  - 964883
AU  - Helfen, L. - Myagotin, A. - Mikulík, Petr - Pernot, P. - Voropaev, A. - Elyyan, M. - Di Michiel, M. - Baruchel, J. - Baumbach, T.
PY  - 2011
TI  - On the implementation of computed laminography using synchrotron radiation
JF  - Review of Scientific Instruments
VL  - 82
IS  - 1
SP  - "nestrankovano"
EP  - "nestrankovano"
PB  - American Institute of Physics
SN  - 00346748
KW  - x-ray imaging
KW  - laminography
KW  - synchrotron radiation
KW  - radiography
KW  - CT
UR  - http://rsi.aip.org/resource/1/rsinak/v82/i6/p063702_s1?isAuthorized=no
N2  - Hard x rays from a synchrotron source are used in this implementation of computed laminography for three-dimensional (3D) imaging of flat, laterally extended objects. Due to outstanding properties of synchrotron light, high spatial resolution down to the micrometer scale can be attained, even for specimens having lateral dimensions of several decimeters. Operating either with a monochromatic or with a white synchrotron beam, the method can be optimized to attain high sensitivity or considerable inspection throughput in synchrotron user and small-batch industrial experiments. The article describes the details of experimental setups, alignment procedures, and the underlying reconstruction principles. Imaging of interconnections in flip-chip and wire-bonded devices illustrates the peculiarities of the method compared to its alternatives and demonstrates the wide application potential for the 3D inspection and quality assessment in microsystem technology.
ER  -

HELFEN, L., A. MYAGOTIN, Petr MIKULÍK, P. PERNOT, A. VOROPAEV, M. ELYYAN, M. DI MICHIEL, J. BARUCHEL a T. BAUMBACH. On the implementation of computed laminography using synchrotron radiation. \textit{Review of Scientific Instruments}. Melville (USA): American Institute of Physics, 2011, roč.~82, č.~1, s.~''nestrankovano'', 8 s. ISSN~0034-6748.

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