| HAZDRA, Pavel, Volodymyr KOMARNITSKYY a Vilma BURŠÍKOVÁ. Hydrogenation of platinum introduced in silicon by radiation enhanced diffusion. Materials Science and Engineering. Lausanne: ELSEVIER SCIENCE SA, 2009, roč. 2008, 159-60, s. 342-345. ISSN 0921-5107. Dostupné z: https://dx.doi.org/10.1016/j.mseb.2008.11.038. |
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@article{979109,
author = {Hazdra, Pavel and Komarnitskyy, Volodymyr and Buršíková, Vilma},
article_location = {Lausanne},
article_number = {159-60},
doi = {http://dx.doi.org/10.1016/j.mseb.2008.11.038},
keywords = {diffusion; hydrogenation; platinum; silicon},
language = {eng},
issn = {0921-5107},
journal = {Materials Science and Engineering},
title = {Hydrogenation of platinum introduced in silicon by radiation enhanced diffusion},
volume = {2008},
year = {2009}
}
TY - JOUR
ID - 979109
AU - Hazdra, Pavel - Komarnitskyy, Volodymyr - Buršíková, Vilma
PY - 2009
TI - Hydrogenation of platinum introduced in silicon by radiation enhanced diffusion
JF - Materials Science and Engineering
VL - 2008
IS - 159-60
SP - 342-345
EP - 342-345
PB - ELSEVIER SCIENCE SA
SN - 09215107
KW - diffusion
KW - hydrogenation
KW - platinum
KW - silicon
N2 - The paper deals with hydrogenation of platinum atoms introduced in silicon by radiation enhanced diffusion. The interaction of defects and arising deep levels are investigated by means of deep level transient spectroscopy.
ER -
HAZDRA, Pavel, Volodymyr KOMARNITSKYY a Vilma BURŠÍKOVÁ. Hydrogenation of platinum introduced in silicon by radiation enhanced diffusion. \textit{Materials Science and Engineering}. Lausanne: ELSEVIER SCIENCE SA, 2009, roč.~2008, 159-60, s.~342-345. ISSN~0921-5107. Dostupné z: https://dx.doi.org/10.1016/j.mseb.2008.11.038.
|
