Current state and prospects of scintillation materials for detectors in SEM

SCHAUER, Petr a Jan BOK. Current state and prospects of scintillation materials for detectors in SEM. In Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: ISI ASCR, 2012, s. 67-68. ISBN 978-80-87441-07-7.

Základní údaje

Originální název

Current state and prospects of scintillation materials for detectors in SEM

Autoři

SCHAUER, Petr a Jan BOK

Vydání

Brno, Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, od s. 67-68, 2012

Nakladatel

ISI ASCR

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Další údaje

Typ výsledku

Stať ve sborníku

Utajení

není předmětem státního či obchodního tajemství

Označené pro přenos do RIV

Ne

ISBN

978-80-87441-07-7

Příznaky

Mezinárodní význam, Recenzováno

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Anotace

V originále

The two principal quantities are important for assessing the quality of each imaging system. Firstly, it is the detective quantum efficiency (DQE), which is primarily a measure of image noise. As the DQE is determined by signal to noise ratio (SNR), the efficient and noise-free components are the key to the high DQE. Second, not less important indicator of image quality is also the modulation transfer function (MTF). MTF describes the ability of adjacent pixels to change from black to white in response to patterns of varying spatial frequency, and hence it determines the actual capability to show fine detail, whether with full or reduced contrast. Using a scanning imaging system the fast components are the key to the good MTF. In a scintillation electron detector of scanning electron microscope (SEM) the scintillator is the most crucial component, because it significantly influences both the DQE and MTF. The aim of this study is to assess the scintillation materials suitable for SEM detectors characterized by the both high efficiency and fast decay characteristic.