Publication Records

VAŠINA, Petr and Pavel DVOŘÁK. Harmonic analysis of discharge voltages as a tool to control the RF sputtering deposition process. Europhysics Letters. European Physical Society, 2009, vol. 85, No 1, p. 15002-15006. ISSN 0295-5075.

VAŠINA, Petr and Pavel DVOŘÁK. Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process. In Book of Contributed Papers of 17th Symposium on Applications of Plasma Processes. Bratislava: Comenius University in Bratislava, 2009, p. 253. ISBN 978-80-89186-45-7.

VAŠINA, Petr and Pavel DVOŘÁK. Is it possible to control degree of target poisoning during RF reactive magnetron sputtering by higher harmonic frequencies of discharge voltage? In Frontiers in Low Temperature Plasma Diagnostics 8 - Book of abstracts. Brno: VUT Brno, 2009, p. 74. ISBN 978-80-214-3875-0.

DVOŘÁK, Pavel and Petr VAŠINA. Harmonic analysis of discharge voltages as a tool to control RF sputtering deposition process. In 19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases - Book of Abstracts. 32 A. Granada: European Physical Society, 2008, p. 78P (topic 5), 2 pp. ISBN 2-914771-04-5.

ELIÁŠ, Marek, Pavel SOUČEK and Petr VAŠINA. Influence of N2 and CH4 on depositon rate of boron based thin films prepared by magnetron sputtering. Chemické listy. 2008, vol. 102, No 1, p. 1506-1509. ISSN 1803-2389.

DVOŘÁK, Pavel and Petr VAŠINA. Measurement of Fundamental and Higher Harmonic Frequencies as Tool to Control RF Sputtering Deposition Process. In Programme and Abstract Book of the 23rd Symposium on Plasma Physics and Technology. Praha: CVUT v Praze, 2008, p. 91-92, 1 pp. ISBN 978-80-01-04030-0.

VAŠINA, Petr, Tereza HYTKOVÁ and Marek ELIÁŠ. Role of Neutral Gas Temperature on Hysteresis Behaviour of Reactive Sputtering Deposition Process. In Programme and Abstract Book of 23rd Symposium on Plasma Physics and Technology, Prague, Czech Republic, 16.-19.June 2008. Praha: České vysoké učení technické, 2008, p. 172-173. ISBN 978-80-01-04030-0.

BURŠÍKOVÁ, Vilma, Jaroslav SOBOTA and Jiří BURŠÍK. Study of Mechanical Properties of Nanostructured Multilayer NbN/C-N Coatings Prepared by Reactive Sputtering. In Proceedings of SAPP XIV. první a poslední. Bratislava, Slovak republic: Pavol Šutta, Jarmila Mullerová, and Róbert Mikuláš, 2003, p. 199-200. ISBN 80-8040-195-0.