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Preparation and characterisation of carbon films prepared from HMDSZ/Methane/Nitrogen or Hydrogen mixture using PECVD a - Konferenční abstraktKELAR, Lukáš; Vilma BURŠÍKOVÁ a Zdeněk BOCHNÍČEK. Preparation and characterisation of carbon films prepared from HMDSZ/Methane/Nitrogen or Hydrogen mixture using PECVD. In 2nd Central European Symposium on Plasma Chemistry. 2008.Podrobněji: https://is.muni.cz/publication/813627/cs