A comparison of different measurement methods of mechanical
properties of Al thin films

D 2015

A comparison of different measurement methods of mechanical properties of Al thin films

TRUHLÁŘ, Michal; Vilma BURŠÍKOVÁ; Jaroslav SOBOTA a Tomáš KRUML

Základní údaje

Originální název

A comparison of different measurement methods of mechanical properties of Al thin films

Autoři

TRUHLÁŘ, Michal; Vilma BURŠÍKOVÁ; Jaroslav SOBOTA a Tomáš KRUML

Vydání

1. vydání. Ostrava, NANOCON 2014, 6th International Conference: Conference Proceedings, od s. 753-758, 6 s. 2015

Nakladatel

TANGER Ltd.

Další údaje

Jazyk

angličtina

Typ výsledku

Stať ve sborníku

Obor

10302 Condensed matter physics

Stát vydavatele

Česká republika

Utajení

není předmětem státního či obchodního tajemství

Forma vydání

paměťový nosič (CD, DVD, flash disk)

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/15:00082748

Organizační jednotka

Přírodovědecká fakulta

ISBN

978-80-87294-53-6

UT WoS

000350636300129

Klíčová slova česky

mikrokomprese, nanoindentace, mechanické vlastnosti, Youngův modul

Klíčová slova anglicky

Microcompression; nanoindentation; mechanical properties; Young modulus

Štítky

AKR, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 28. 4. 2016 14:24, Ing. Andrea Mikešková

Anotace

V originále

The paper compares two different methods for testing of metallic thin films: microcompression test and nanoindentation. Microcompression test is one possibility how to perform mechanical tests on a very small scale. This method requires preparation of a small cylindrical specimen (micropillar) of micrometric size by FIB and execution of a compression test using nanoindenter device equipped with a flat diamond punch. Stressstrain curves of the thin films were obtained from such tests. Nanoindentation tests were then conducted to compare the results on the same films. Two different metal thin films - AlCuW, AlCuSi with thickness 2 mu m and grain size 3.8 mu m in average were prepared by PVD method. In this paper, we announce the results of measurements, a comparison of the results obtained by each method and identify advantages and limitations of the methods.

Návaznosti

ED2.1.00/03.0086, projekt VaV

Název: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

Přiložené soubory

A_comparison_of_different_measurement_methods_of_mechanical_properties_of_Al_thin_films_vggjrrli.pdf

A_comparison_of_different_measurement_methods_of_mechanical_properties_of_Al_thin_films.pdf

Požádat o autorskou verzi souboru

Citovat

TRUHLÁŘ, Michal; Vilma BURŠÍKOVÁ; Jaroslav SOBOTA a Tomáš KRUML. A comparison of different measurement methods of mechanical properties of Al thin films. In NANOCON 2014, 6th International Conference: Conference Proceedings. 1. vydání. Ostrava: TANGER Ltd., 2015, s. 753-758. ISBN 978-80-87294-53-6.

@inproceedings{1298312,
   author = {Truhlář, Michal and Buršíková, Vilma and Sobota, Jaroslav and Kruml, Tomáš},
   address = {Ostrava},
   booktitle = {NANOCON 2014, 6th International Conference: Conference Proceedings},
   edition = {1. vydání},
   keywords = {Microcompression; nanoindentation; mechanical properties; Young modulus},
   howpublished = {paměťový nosič},
   language = {eng},
   location = {Ostrava},
   isbn = {978-80-87294-53-6},
   pages = {753-758},
   publisher = {TANGER Ltd.},
   title = {A comparison of different measurement methods of mechanical properties of Al thin films},
   year = {2015}
}

TY  - CONF
ID  - 1298312
AU  - Truhlář, Michal - Buršíková, Vilma - Sobota, Jaroslav - Kruml, Tomáš
PY  - 2015
TI  - A comparison of different measurement methods of mechanical properties of Al thin films
PB  - TANGER Ltd.
CY  - Ostrava
SN  - 9788087294536
KW  - Microcompression
KW  - nanoindentation
KW  - mechanical properties
KW  - Young modulus
N2  - The paper compares two different methods for testing of metallic thin films: microcompression test and nanoindentation. Microcompression test is one possibility how to perform mechanical tests on a very small scale. This method requires preparation of a small cylindrical specimen (micropillar) of micrometric size by FIB and execution of a compression test using nanoindenter device equipped with a flat diamond punch. Stressstrain curves of the thin films were obtained from such tests. Nanoindentation tests were then conducted to compare the results on the same films. Two different metal thin films - AlCuW, AlCuSi with thickness 2 mu m and grain size 3.8 mu m in average were prepared by PVD method. In this paper, we announce the results of measurements, a comparison of the results obtained by each method and identify advantages and limitations of the methods.
ER  -

TRUHLÁŘ, Michal; Vilma BURŠÍKOVÁ; Jaroslav SOBOTA a Tomáš KRUML. A comparison of different measurement methods of mechanical properties of Al thin films. In \textit{NANOCON 2014, 6th International Conference: Conference Proceedings}. 1. vydání. Ostrava: TANGER Ltd., 2015, s.~753-758. ISBN~978-80-87294-53-6.

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